Jiaxin ZHENG, Bingrong GAO, Yafei XUE, Ziyi LUO, Shanguo HAN, Xueqing LIU, Qidai CHEN. Fabrication of Sapphire Grating by Femtosecond Laser Assisted Etching（Invited）[J]. Acta Photonica Sinica, 2021, 50(6): 84
- Acta Photonica Sinica
- Vol. 50, Issue 6, 84 (2021)
Fig. 1. Schematic diagram of the fabrication process
Fig. 2. SEM images of the sapphire gratings with different period
Fig. 3. SEM images and cross-sectional profile of sapphire gratings with different duty cycles
Fig. 4. SEM images of sapphire nano grating and microstructure of sapphire with different depth
Fig. 5. Comparison of sapphire grating diffraction results and diffraction efficiency of sapphire grating
Fig. 6. Characterization of sapphire grating roughness and structural height changes before and after processing
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