LIU Yan-fang, LIU Xing-fu, QI Nai-ming, ZHANG Liu. Design of supper low disturbance torque air bearing table with active compensation[J]. Optics and Precision Engineering, 2016, 24(10): 2432

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- Optics and Precision Engineering
- Vol. 24, Issue 10, 2432 (2016)
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