[1] Fang F 2020 Atomic and close-to-atomic scale manufacturing: perspectives and measures Int. J. Extreme Manuf. 2 030201

[2] Kim M-S, Purushothaman M, Kim H-T, Song H-J and Park J-G 2017 Adhesion and removal behavior of particulate contaminants from EUV mask materials Colloids Surf. A 535 83-88

[3] Chen L, Wen J, Zhang P, Yu B, Chen C, Ma T, Lu X, Kim S H and Qian L 2018 Nanomanufacturing of silicon surface with a single atomic layer precision via mechanochemical reactions Nat. Commun. 9 1542

[4] Khajetoorians A A, Wiebe J, Chilian B and Wiesendanger R 2011 Realizing all-spin-based logic operations atom by atom Science 332 1062-4

[5] Huff T, Labidi H, Rashidi M, Livadaru L, Dienel T, Achal R, Vine W, Pitters J and Wolkow R A 2018 Binary atomic silicon logic Nat. Electron. 1 636-43

[6] Specht H P, Nolleke C, Reiserer A, Uphoff M, Figueroa E, Ritter S and Rempe G 2011 A single-atom quantum memory Nature 473 190-3

[7] Fang F, Zhang N, Guo D, Ehmann K, Cheung B, Liu K and Yamamura K 2019 Towards atomic and close-to-atomic scale manufacturing Int. J. Extreme Manuf. 1 012001

[8] Zhao D and Lu X 2013 Chemical mechanical polishing: theory and experiment Friction 1 306-26

[9] Bullen D, Chung S-W, Wang X, Zou J, Mirkin C A and Liu C 2004 Parallel dip-pen nanolithography with arrays of individually addressable cantilevers Appl. Phys. Lett. 84 789-91

[10] Kim H 2003 Atomic layer deposition of metal and nitride thin films: current research efforts and applications for semiconductor device processing J. Vac. Sci. Technol. B 21 2231-61

[11] Yip W and To S 2018 Sustainable manufacturing of ultra-precision machining of titanium alloys using a magnetic field and its sustainability assessment Sustain. Mater. Technol. 16 38-46

[12] Israelachvili J N 2011 Intermolecular and Surface Forces (New York: Academic)

[13] Zheng Q, Jiang B, Liu S, Weng Y, Lu L, Xue Q, Zhu J, Jiang Q, Wang S and Peng L 2008 Self-retracting motion of graphite microflakes Phys. Rev. Lett. 100 067205

[14] Liu Z, Yang J, Grey F, Liu J Z, Liu Y, Wang Y, Yang Y, Cheng Y and Zheng Q 2012 Observation of microscale superlubricity in graphite Phys. Rev. Lett. 108 205503

[15] Zhang Z et al 2020 Macroscale superlubricity enabled by graphene-coated surfaces Adv. Sci. 7 1903239

[16] Hod O, Meyer E, Zheng Q and Urbakh M 2018 Structural superlubricity and ultralow friction across the length scales Nature 563 485-92

[17] Zhang Z, Du Y, Huang S, Meng F, Chen L, Xie W, Chang K, Zhang C, Lu Y and Lin C et al 2020 Macroscale superlubricity: macroscale superlubricity enabled by graphene-coated surfaces Adv. Sci. 7 2070023

[18] Zhang J, Chen P, Yuan B, Ji W, Cheng Z and Qiu X 2013 Real-space identification of intermolecular bonding with atomic force microscopy Science 342 611-4

[19] Gross L, Mohn F, Moll N, Meyer G, Ebel R, Abdel-Mageed W M and Jaspars M 2010 Organic structure determination using atomic-resolution scanning probe microscopy Nat. Chem. 2 821-5

[20] Hapala P, Kichin G, Wagner C, Tautz F S, Temirov R and Jelinek P 2014 Mechanism of high-resolution STM/AFM imaging with functionalized tips Phys. Rev. B 90 085421

[21] Han T, Zhang C, Li J, Yuan S, Chen X, Zhang J and Luo J 2019 Origins of superlubricity promoted by hydrated multivalent ions J. Phys. Chem. Lett. 11 184-90

[22] Derjaguin B, Churaev N and Muller V 1987 The Derjaguin—Landau—Verwey—Overbeek (DLVO) theory of stability of lyophobic colloids Surface Forces (Berlin: Springer) pp 293-310

[23] Chavoshi S Z and Luo X 2016 Molecular dynamics simulation study of deformation mechanisms in 3C-SiC during nanometric cutting at elevated temperatures Mater. Sci. Eng. A 654 400-17

[24] Wang J, Zhang X, Fang F and Chen R 2018 A numerical study on the material removal and phase transformation in the nanometric cutting of silicon Appl. Surf. Sci. 455 608-15

[25] Lai M, Zhang X D and Fang F Z 2012 Study on critical rake angle in nanometric cutting Appl. Phys. A 108 809-18

[26] Lennard-Jones J 1937 The equation of state of gases and critical phenomena Physica 4 941-56

[27] Komanduri R and Raff L 2001 A review on the molecular dynamics simulation of machining at the atomic scale Proc. Inst. Mech. Eng. B 215 1639-72

[28] Wen J, Ma T, Zhang W, van Duin A C and Lu X 2017 Atomistic mechanisms of Si chemical mechanical polishing in aqueous H2O2: reaxFF reactive molecular dynamics simulations Comput. Mater. Sci. 131 230-8

[29] Jia W, Wang H, Chen M, Lu D, Lin L, Car R, Weinan E and Zhang L 2020 Pushing the limit of molecular dynamics with ab initio accuracy to 100 million atoms with machine learning SC20: Int. Conf. for High Performance Computing, Networking, Storage and Analysis (IEEE) pp 1-14

[30] Wang L-F, Ma T-B, Hu Y-Z and Wang H 2012 Atomic-scale friction in graphene oxide: an interfacial interaction perspective from first-principles calculations Phys. Rev. B 86 125436

[31] An Q, Jaramillo-Botero A, Liu W-G and Goddard III W A 2015 Reaction pathways of GaN (0001) growth from trimethylgallium and ammonia versus triethylgallium and hydrazine using first principle calculations J. Phys. Chem. C 119 4095-103

[32] Iskandarova I, Knizhnik A, Rykova E, Bagatur’yants A, Potapkin B and Korkin A 2003 First-principle investigation of the hydroxylation of zirconia and hafnia surfaces Microelectron. Eng. 69 587-93

[33] Eigler D M and Schweizer E K 1990 Positioning single atoms with a scanning tunnelling microscope Nature 344 524-6

[34] Bartels L, Meyer G and Rieder K-H 1997 Basic steps of lateral manipulation of single atoms and diatomic clusters with a scanning tunneling microscope tip Phys. Rev. Lett. 79 697

[35] Eigler D M, Lutz C and Rudge W 1991 An atomic switch realized with the scanning tunnelling microscope Nature 352 600-3

[36] Budau P and Grigorescu M 1998 Atom transfer in the STM double-well potential during a voltage pulse Phys. Rev. B 57 6313

[37] Kobayashi N, Hirose K and Tsukada M 1996 First-principles study of Na atom transfer induced by the tip of a STM Surf. Sci. 348 299-304

[38] Custance O, Perez R and Morita S 2009 Atomic force microscopy as a tool for atom manipulation Nat. Nanotechnol. 4 803-10

[39] Sugimoto Y, Pou P, Custance O, Jelinek P, Abe M, Perez R and Morita S 2008 Complex patterning by vertical interchange atom manipulation using atomic force microscopy Science 322 413-7

[40] Wu Z, Liu J, Li Y, Cheng Z, Li T, Zhang H, Lu Z and Yang B 2015 Self-assembly of nanoclusters into mono-, few-, and multilayered sheets via dipole-induced asymmetric van der Waals attraction ACS nano 9 6315-23

[41] Zhao C, Wang X, Kong J, Ang J M, Lee P S, Liu Z and Lu X 2016 Self-assembly-induced alternately stacked single-layer MoS2 and N-doped graphene: a novel van der Waals heterostructure for lithium-ion batteries ACS Appl. Mater. Interfaces 8 2372-9

[42] Caplan M R, Moore P N, Zhang S, Kamm R D and Lauffenburger D A 2000 Self-assembly of a β-sheet protein governed by relief of electrostatic repulsion relative to van der Waals attraction Biomacromolecules 1 627-31

[43] Zhao K and Mason T G 2007 Directing colloidal self-assembly through roughness-controlled depletion attractions Phys. Rev. Lett. 99 268301

[44] Hu S-W, Sheng Y-J and Tsao H-K 2012 Self-assembly of organophilic nanoparticles in a polymer matrix: depletion interactions J. Phys. Chem. C 116 1789-97

[45] Maia R, Macedo R H and Shawkey M D 2012 Nanostructural self-assembly of iridescent feather barbules through depletion attraction of melanosomes during keratinization J. R. Soc. Interface 9 734-43

[46] Baker J L, Widmer-Cooper A, Toney M F, Geissler P L and Alivisatos A P 2010 Device-scale perpendicular alignment of colloidal nanorods Nano Lett. 10 195-201

[47] Clark T D, Tien J, Duffy D C, Paul K E and Whitesides G M 2001 Self-assembly of 10-μm-sized objects into ordered three-dimensional arrays J. Am. Chem. Soc. 123 7677-82

[48] Velikov K, Durst F and Velev O 1998 Direct observation of the dynamics of latex particles confined inside thinning water- air films Langmuir 14 1148-55

[49] Asakura S and Oosawa F 1954 On interaction between two bodies immersed in a solution of macromolecules J. Chem. Phys. 22 1255-6

[50] Baranov D, Fiore A, Van Huis M, Giannini C, Falqui A, Lafont U, Zandbergen H, Zanella M, Cingolani R and Manna L 2010 Assembly of colloidal semiconductor nanorods in solution by depletion attraction Nano Lett. 10 743-9

[51] Savenko S and Dijkstra M 2006 Phase behavior of a suspension of colloidal hard rods and nonadsorbing polymer J. Chem. Phys. 124 234902

[52] Ashton D J, Jack R L and Wilding N B 2013 Self-assembly of colloidal polymers via depletion-mediated lock and key binding Soft Matter 9 9661-6

[53] Wei P, Yan X and Huang F 2015 Supramolecular polymers constructed by orthogonal self-assembly based on host-guest and metal-ligand interactions Chem. Soc. Rev. 44 815-32

[54] Pluth M D and Raymond K N 2007 Reversible guest exchange mechanisms in supramolecular host-guest assemblies Chem. Soc. Rev. 36 161-71

[55] Basilio N and Pischel U 2016 Drug delivery by controlling a supramolecular host-guest assembly with a reversible photoswitch Chem. Eur. J. 22 15208-11

[56] Tan S, Shi H, Fu L, Ma J, Du X, Song J, Liu Y, Zeng Q, Xu H and Wan J 2020 Superlubricity of fullerene derivatives induced by host-guest assembly ACS Appl. Mater. Interfaces 12 18924-33

[57] Suntola T and Antson J 1977 Method for producing compound thin films ( Google Patents)

[58] Ritala M and Leskela M 2002 Atomic layer deposition Handbook of Thin Films (Amsterdam: Elsevier) pp 103-59

[59] Pore V, Hatanpaa T, Ritala M and Leskela M 2009 Atomic layer deposition of metal tellurides and selenides using alkylsilyl compounds of tellurium and selenium J. Am. Chem. Soc. 131 3478-80

[60] Fang F Z, Zhang X D, Gao W, Guo Y B, Byrne G and Hansen H N 2017 Nanomanufacturing—perspective and applications CIRP Ann. 66 683-705

[61] Taniguchi N 1983 Current status in, and future trends of, ultraprecision machining and ultrafine materials processing CIRP Ann. 32 573-82

[62] McKeown P 1987 The role of precision engineering in manufacturing of the future CIRP Ann. 36 495-501

[63] Fang F Z, Wu H and Liu Y C 2005 Modelling and experimental investigation on nanometric cutting of monocrystalline silicon Int. J. Mach. Tools Manuf. 45 1681-6

[64] Fang F Z and Venkatesh V C 1998 Diamond cutting of silicon with nanometric finish CIRP Ann. 47 45-49

[65] Cheong W and Zhang L 2000 Molecular dynamics simulation of phase transformations in silicon monocrystals due to nano-indentation Nanotechnology 11 173

[66] Zhang L and Zarudi I 2001 Towards a deeper understanding of plastic deformation in mono-crystalline silicon Int. J. Mech. Sci. 43 1985-96

[67] Liu K, Li X P and Liang S Y 2007 The mechanism of ductile chip formation in cutting of brittle materials Int. J. Adv. Manuf. Technol. 33 875-84

[68] Wu W, Xu Z, Fang F, Liu B, Xiao Y, Chen J, Wang X and Liu H 2014 Decrease of FIB-induced lateral damage for diamond tool used in nano cutting Nucl. Instrum. Methods Phys. Res. B 330 91-98

[69] Wang M, Wang W and Lu Z 2012 Anisotropy of machined surfaces involved in the ultra-precision turning of single-crystal silicon—a simulation and experimental study Int. J. Adv. Manuf. Technol. 60 473-85

[70] Shahinian H, Navare J A, Bodlapati C, Zaytsev D, Kang D and Ravindra D 2019 High speed ultraprecision machining of germanium Proc. SPIE 11175 111750E

[71] Lawson B L, Kota N and Ozdoganlar O B 2008 Effects of crystallographic anistropy on orthogonal micromachining of single-crystal aluminum J. Manuf. Sci. Eng. 130 031116

[72] Xie W and Fang F 2020 Mechanism of atomic and close-to-atomic scale cutting of monocrystalline copper Appl. Surf. Sci. 503 144239

[73] Abdulkadir L N, Abou-El-Hossein K, Jumare A I, Liman M M, Olaniyan T A and Odedeyi P B 2018 Review of molecular dynamics/experimental study of diamond-silicon behavior in nanoscale machining Int. J. Adv. Manuf. Technol. 98 317-71

[74] Pei Q, Lu C, Fang F and Wu H 2006 Nanometric cutting of copper: a molecular dynamics study Comput. Mater. Sci. 37 434-41

[75] Goel S, Kovalchenko A, Stukowski A and Cross G 2016 Influence of microstructure on the cutting behaviour of silicon Acta Mater. 105 464-78

[76] Kim C-J, Mayor R and Ni J 2012 Molecular dynamics simulations of plastic material deformation in machining with a round cutting edge Int. J. Precis. Eng. Manuf. 13 1303-9

[77] Goel S, Luo X, Reuben R L and Rashid W B 2011 Atomistic aspects of ductile responses of cubic silicon carbide during nanometric cutting Nanoscale Res. Lett. 6 1-9

[78] Garcia R, Knoll A W and Riedo E 2014 Advanced scanning probe lithography Nat. Nanotechnol. 9 577-87

[79] Pires D, Hedrick J L, De Silva A, Frommer J, Gotsmann B, Wolf H, Despont M, Duerig U and Knoll A W 2010 Nanoscale three-dimensional patterning of molecular resists by scanning probes Science 328 732-5

[80] Fuechsle M, Miwa J A, Mahapatra S, Ryu H, Lee S, Warschkow O, Hollenberg L C, Klimeck G and Simmons M Y 2012 A single-atom transistor Nat. Nanotechnol. 7 242-6

[81] Keyvani A, Tamer M S, van Es M H and Sadeghian H 2016 Simultaneous AFM nano-patterning and imaging for photomask repair, metrology, inspection, and process control for microlithography XXX International Society for Optics and Photonics p 977818

[82] Deng J, Zhang L, Dong J and Cohen P H 2016 AFM-based 3D nanofabrication using ultrasonic vibration assisted nanomachining J. Manuf. Process. 24 195-202

[83] Miyake S and Kim J 2004 Nanoprocessing of silicon by mechanochemical reaction using atomic force microscopy and additional potassium hydroxide solution etching Nanotechnology 16 149

[84] Chien F-S, Chou Y, Chen T, Hsieh W-F, Chao T-S and Gwo S 2001 Nano-oxidation of silicon nitride films with an atomic force microscope: chemical mapping, kinetics, and applications J. Appl. Phys. 89 2465-72

[85] Li Y, Maynor B W and Liu J 2001 Electrochemical AFM ‘dip-pen’ nanolithography J. Am. Chem. Soc. 123 2105-6

[86] Bozkaya D and Müftü S 2009 A material removal model for CMP based on the contact mechanics of pad, abrasives, and wafer J. Electrochem. Soc. 156 H890

[87] Xu W, Lu X, Pan G, Lei Y and Luo J 2010 Ultrasonic flexural vibration assisted chemical mechanical polishing for sapphire substrate Appl. Surf. Sci. 256 3936-40

[88] Cheng J, Wang T, Mei H, Zhou W and Lu X 2014 Synergetic effect of potassium molybdate and benzotriazole on the CMP of ruthenium and copper in KIO4-based slurry Appl. Surf. Sci. 320 531-7

[89] Zhang Z, Cui J, Zhang J, Liu D, Yu Z and Guo D 2019 Environment friendly chemical mechanical polishing of copper Appl. Surf. Sci. 467 5-11

[90] Xie W, Zhang Z, Liao L, Liu J, Su H, Wang S and Guo D 2020 Green chemical mechanical polishing of sapphire wafers using a novel slurry Nanoscale 12 22518-26

[91] Zhang Z, Liao L, Wang X, Xie W and Guo D 2020 Development of a novel chemical mechanical polishing slurry and its polishing mechanisms on a nickel alloy Appl. Surf. Sci. 506 144670

[92] Liao L, Zhang Z, Meng F, Liu D, Wu B, Li Y and Xie W 2021 A novel slurry for chemical mechanical polishing of single crystal diamond Appl. Surf. Sci. 564 150431

[93] Gao P, Liu T, Zhang Z, Meng F, Ye R-P and Liu J 2021 Non-spherical abrasives with ordered mesoporous structures for chemical mechanical polishing Sci. China Mater. 64 2747-63

[94] Si L, Guo D, Luo J and Lu X 2010 Monoatomic layer removal mechanism in chemical mechanical polishing process: a molecular dynamics study J. Appl. Phys. 107 064310

[95] Chen R, Luo J, Guo D and Lu X 2008 Extrusion formation mechanism on silicon surface under the silica cluster impact studied by molecular dynamics simulation J. Appl. Phys. 104 104907

[96] Si L, Guo D, Luo J, Lu X and Xie G 2011 Abrasive rolling effects on material removal and surface finish in chemical mechanical polishing analyzed by molecular dynamics simulation J. Appl. Phys. 109 084335

[97] Watanabe T, Fujiwara H, Noguchi H, Hoshino T and Ohdomari I 1999 Novel interatomic potential energy function for Si, O mixed systems Jpn. J. Appl. Phys. 38 L366

[98] Wen J, Ma T, Zhang W, Psofogiannakis G, van Duin A C T, Chen L, Qian L, Hu Y and Lu X 2016 Atomic insight into tribochemical wear mechanism of silicon at the Si/SiO2 interface in aqueous environment: molecular dynamics simulations using ReaxFF reactive force field Appl. Surf. Sci. 390 216-23

[99] van Duin A C, Dasgupta S, Lorant F and Goddard W A 2001 ReaxFF: a reactive force field for hydrocarbons J. Phys. Chem. A 105 9396-409

[100] Zhang Z, Wang B, Kang R, Zhang B and Guo D 2015 Changes in surface layer of silicon wafers from diamond scratching CIRP Ann. 64 349-52

[101] Wang B et al 2018 New deformation-induced nanostructure in silicon Nano Lett. 18 4611-7

[102] Zhang Z, Wang X, Meng F, Liu D, Huang S, Cui J, Wang J and Wen W 2022 Origin and evolution of a crack in silicon induced by a single grain grinding J. Manuf. Process. 75 617-26

[103] Li C, Zhao D, Xie L and Lu X 2020 Mechanism analysis of nanoparticle removal induced by the Marangoni-driven flow in post-CMP cleaning ECS J. Solid State Sci. Technol. 9 023002

[104] Wen X, Bai P, Li Y, Cao H, Li S, Wang B, Fang J, Meng Y, Ma L and Tian Y 2021 Effects of abrasive particles on liquid superlubricity and mechanisms for their removal Langmuir 37 3628-36

[105] Ming L, Jieli W, Yongqian W, Yan X, Dongni Z, Zhen H, Fugui Y and Yongjian W 2020 A review on the fabrication technology of x-ray reflector Opto-Electron. Eng. 47 200205-200201-200205-200212

[106] Koike K, Yoshino Y, Senoo T, Seki T, Ninomiya S, Aoki T and Matsuo J 2010 Anisotropic etching using reactive cluster beams Appl. Phys. Express 3 126501

[107] Yamauchi K, Mimura H, Inagaki K and Mori Y 2002 Figuring with subnanometer-level accuracy by numerically controlled elastic emission machining Rev. Sci. Instrum. 73 4028-33

[108] Mori Y, Yamauchi K and Endo K 1987 Elastic emission machining Precis. Eng. 9 123-8

[109] Schmitt J, Nelissen W, Wallrabe U and Volklein F 2017 Implementation of smooth nanocrystalline diamond microstructures by combining reactive ion etching and ion beam etching Diam. Relat. Mater. 79 164-72

[110] Mi S, Toros A, Graziosi T and Quack N 2019 Non-contact polishing of single crystal diamond by ion beam etching Diam. Relat. Mater. 92 248-52

[111] Li Y, Takino H and Frost F 2017 Ion beam planarization of diamond turned surfaces with various roughness profiles Opt. Express 25 7828-38

[112] Eyring H 1935 The activated complex in chemical reactions J. Chem. Phys. 3 107-15

[113] Kauzmann W and Eyring H 1940 The viscous flow of large molecules J. Am. Chem. Soc. 62 3113-25

[114] Bustamante C, Chemla Y R, Forde N R and Izhaky D 2004 Mechanical processes in biochemistry Annu. Rev. Biochem. 73 705-48

[115] Briscoe B and Evans D 1982 The shear properties of Langmuir—Blodgett layers Proc. R. Soc. A 380 389-407

[116] Eremets M I, Drozdov A P, Kong P and Wang H 2019 Semimetallic molecular hydrogen at pressure above 350 GPa Nat. Phys. 15 1246-9

[117] Gutman E 1989 Mechanochemistry and Corrosion Prevention of Metals (Beijing: Science Press)

[118] Chen L-Q 2019 Chemical potential and Gibbs free energy MRS Bull. 44 520-3

[119] Liu C, Tian Y and Meng Y 2021 A chemical potential equation for modeling triboelectrochemical reactions on solid-liquid interfaces Front. Chem. 9 650880

[120] Chen S et al 2018 On the limits of scalpel AFM for the 3D electrical characterization of nanomaterials Adv. Funct. Mater. 28 1802266

[121] Pinilla-Cienfuegos E, Manas-Valero S, Navarro-Moratalla E, Tatay S, Forment-Aliaga A and Coronado E 2016 Local oxidation nanolithography on metallic transition metal dichalcogenides surfaces Appl. Sci. 6 250

[122] Liu W, Liu N, Sun J, Hsu P-C, Li Y, Lee H-W and Cui Y 2015 Ionic conductivity enhancement of polymer electrolytes with ceramic nanowire fillers Nano Lett. 15 2740-5

[123] Chen T, Lin H, Cao Y, Yao Q and Xie J 2021 Interactions of metal nanoclusters with light: fundamentals and applications Adv. Mater. 2103918 [Online ahead of print]

[124] Bunch J S, van der Zande A M, Verbridge S S, Frank I W, Tanenbaum D M, Parpia J M, Craighead H G and McEuen P L 2007 Electromechanical resonators from graphene sheets Science 315 490-3

[125] Hassan T, Jamshaid H, Mishra R, Khan M Q, Petru M, Novak J, Choteborsky R and Hromasova M 2020 Acoustic, mechanical and thermal properties of green composites reinforced with natural fibers waste Polymers 12 654