• Photonics Research
  • Vol. 12, Issue 5, 969 (2024)
Peijie Wang1,2,†, Yufeng Pan1,2,†, Jiangshan Zhang3, Jie Zhai1,2..., Deming Liu1,2 and Ping Lu1,2,*|Show fewer author(s)
Author Affiliations
  • 1Wuhan National Laboratory for Optoelectronics (WNLO) and National Engineering Research Center of Next Generation Internet Access System, School of Optical and Electronic Information, Huazhong University of Science and Technology, Wuhan 430074, China
  • 2Optics Valley Laboratory, Wuhan 430074, China
  • 3Department of Electronics and Information Engineering, Huazhong University of Science and Technology, Wuhan 430074, China
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    DOI: 10.1364/PRJ.519946 Cite this Article Set citation alerts
    Peijie Wang, Yufeng Pan, Jiangshan Zhang, Jie Zhai, Deming Liu, Ping Lu, "Miniaturized and highly sensitive fiber-optic Fabry–Perot sensor for mHz infrasound detection," Photonics Res. 12, 969 (2024) Copy Citation Text show less

    Abstract

    Infrasound detection is important in natural disasters monitoring, military defense, underwater acoustic detection, and other domains. Fiber-optic Fabry–Perot (FP) acoustic sensors have the advantages of small structure size, long-distance detection, immunity to electromagnetic interference, and so on. The size of an FP sensor depends on the transducer diaphragm size and the back cavity volume. However, a small transducer diaphragm size means a low sensitivity. Moreover, a small back cavity volume will increase the low cut-off frequency of the sensor. Hence, it is difficult for fiber-optic FP infrasound sensors to simultaneously achieve miniaturization, high sensitivity, and extremely low detectable frequency. In this work, we proposed and demonstrated a miniaturized and highly sensitive fiber-optic FP sensor for mHz infrasound detection by exploiting a Cr-Ag-Au composite acoustic-optic transducer diaphragm and a MEMS technique-based spiral micro-flow hole. The use of the spiral micro-flow hole as the connecting hole greatly reduced the volume of the sensor and decreased the low-frequency limit, while the back cavity volume was not increased. Combined with the Cr-Ag-Au composite diaphragm, a detection sensitivity of -123.19dBre1rad/μPa at 5 Hz and a minimum detectable pressure (MDP) of 1.2mPa/Hz1/2 at 5 Hz were achieved. The low detectable frequency can reach 0.01 Hz and the flat response range was 0.01–2500 Hz with a sensitivity fluctuation of ±1.5dB. Moreover, the size of the designed sensor was only 12mm×Φ12.7mm. These excellent characteristics make the sensor have great practical application prospects.
    Sd=1k2Ph[1J0(ka)1],

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    f=12πCcav+CdCdRhole(1+Ccav/Cd).

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    MDP=N(f)S(f)Δf[PaHz12].

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    r2ξ1c2·2ηt2=pc2σ,(A1)

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    ξ(t,r)=pak2T[J0(kr)J0(ka)1]·ejωt.(A2)

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    fn=δn2πaTσ,(A3)

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    f1=2.4052πaTσ.(A4)

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    Sfact=HSd.(B1)

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    H=poutpin=Z2Z4Z3Z4+(Z1+Z3)(Z3+Z4).(B2)

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    fhigh=12πCcav+CdCcavCd(Mrad+Md),(B3)

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    flow=12πCcav+CdCdRhole(1+Ccav/Cd).(B4)

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    Peijie Wang, Yufeng Pan, Jiangshan Zhang, Jie Zhai, Deming Liu, Ping Lu, "Miniaturized and highly sensitive fiber-optic Fabry–Perot sensor for mHz infrasound detection," Photonics Res. 12, 969 (2024)
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