Study on Performances of Silicon Mach-Zehnder Electro-Optic Modulator Based on MOS Capacitor Electrodes

Yang Jichao; Song Muping

doi:10.3788/cjl201037s1.0141

[1] A. Barkai, Y. Chetrit, O. Cohen et al.. Integrated silicon photonics for optical networks[J]. J. Optical Networking, 2007, 6(1): 25～47

[2] B. Jalali, S. Fathpour. Silicon photonics[J]. J. Lightwave Technol., 2006, 24(12): 4600～4614

[3] Tang Yanzhe, Wang Yuelin, Wu Yaming. Transition loss and polarization effect in planar lightwave circuits based on silicon-on-insulator rib waveguides[J]. Acta Optica Sinica, 2004, 24(2): 203～207

[4] Jia Xiaoling, Gao Fan, Zhang Feng . Design and optimizationof a new type 3×3 silicon-on-insulator multimode interference optical switch[J]. Acta Optica Sinica, 2005, 25(9): 1208～1213

[5] Robert Hull. Properties of Crystalline Silicon[M]. London, UK: INSPEC, IEE, 1999. 677～696

[6] M. Willander. Carrier dependent parameters in a silicon optical waveguide[J]. J. Appl. Phys., 1983, 54(8): 4660～4663

[7] Vittorio M. N. Passaro, Francesco Dell′Olio. Scaling and optimization of MOS optical modulators in nanometer SOI waveguides[J]. IEEE Trans. Nanotechnology, 2008, 7(4): 401～408

[8] Assia Barkai, Yoel Chetrit, Oded Cohen et al.. Integrated silicon photonics for optical networks[J]. J. Optical Networking, 2007, 6(1): 25～47

[9] Ling Liao, Dean Samara-Rubio, Michael Morse et al.. High speed silicon Mach-Zehnder modulator[J]. Opt. Express, 2005, 13(8): 3129～3135

[10] Dean Samara-Rubio, Ulrich D. Keil, Ling Liao et al.. Customized drive electronics to extend silicon optical modulators to 4 Gb/s[J]. J. Lightwave Technol., 2005, 23(12): 4305～4314

[11] Ansheng Liu, Richard Jones, Ling Liao et al.. A high-speed silicon optical modulator based on a metal-oxide-semiconductor capacitor[J]. Nature, 2004, 427(6975): 615～618

[12] C. A. Barrios, M. Lipson. Modeling and analysis of high-speed electro-optic modulation in high confinement silicon waveguides using metal-oxide-semiconductor configuration[J]. J. Appl. Phys., 2004, 96(11): 6008～6015

[13] Carlos Angulo Barrios. Electrooptic modulation of multisilicon-on-insulator photonic wires[J]. J. Lightwave Technol., 2006, 24(5): 2146～2155

[14] R. A. Soref, B. R. Bennett. Kramers-Kronig analysis of electro-optical switching in silicon[C]. SPIE, 1987, 704: 32～37