[1] S. P. Murarka, Silicides For VLSI Applications (Academic, New York, 1983)

[3] S. P. Murarka, J. Vac. Sci. Technol., 17, 775 (1980)

[4] G. V. SamsoDor, Handbook of Refractory Compounds (IFI/Plenum, New York, 1980).

[5] W. G. Moffat,in "The Handbook of Binury Phase actefrDiagrams" (General electric CO Schene-ctady, New York, 1978)