• Chinese Journal of Lasers
  • Vol. 7, Issue 8, 34 (1980)
Zhang Lianging
Author Affiliations
  • [in Chinese]
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    Zhang Lianging. Formation of ohmic contacts on n-type GaAs by laser beam alloying[J]. Chinese Journal of Lasers, 1980, 7(8): 34 Copy Citation Text show less

    Abstract

    We have produced ohmic contact on the surface of n-GaAs using a pusled Q-Switched ruby laser (A=0.6943m), a pulsed Q-Switched YAG laser(A=1.06m)and a frequency doutled pulsed YAG laser (A=0.53m). The specific contact resistance of alloyed Au-Ga-Ni contacts has been measured on the surfaces of n-GaAs. The experimental results show that the use of laser alloying forms more uniform ohmic contacts. The contacts possess electrical properties and surface conditions which are superior to those formed by conventional bulk-heating.
    Zhang Lianging. Formation of ohmic contacts on n-type GaAs by laser beam alloying[J]. Chinese Journal of Lasers, 1980, 7(8): 34
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