FAIMS is a fast and high sensitive technique for detecting trace volatile organic compounds. Spectra of acetone, benzene and toluene were obtained on a homemade high-field asymmetric waveform ion mobility spectrometer and they can be easily separated in the spectra. Three xylene isomeric compounds were also successfully separated in FAIMS. Effect of carrier gas flow rate on the ion intensity was analyzed, and the optimal flow rate of carrier gas was 220 L·h-1 which can be used for the optimization of FAIMS instrument. The detection limit for acetone is 100 ng·L-1 that is an order of magnitude lower than the foreign traditional IMS.