[1] M. Li, L. Wang, X. Li, X. Xiao, S. Yu. Silicon intensity Mach–Zehnder modulator for single lane 100 Gb/s applications. Photon. Res., 6, 109(2018).
[2] Y. Zhu, F. Zhang, F. Yang, L. Zhang, X. Ruan, Y. Li, Z. Chen. Toward single lane 200G optical interconnects with silicon photonic modulator. J. Lightwave Technol., 38, 67(2020).
[3] E. El-Fiky, P. De Heyn, M. Osman, A. Srinivasan, A. Samani, M. Pantouvaki, M. Sowailem, J. Van Campenhout, D. Plant. 112 Gb/s PAM4 transmission over 2 km SMF using a C-band GeSi electro-absorption modulator. Optical Fiber Communication Conference, W2A.16(2018).
[4] Y. Ogiso, J. Ozaki, Y. Ueda, N. Kashio, N. Kikuchi, E. Yamada, H. Tanobe, S. Kanazawa, H. Yamazaki, Y. Ohiso, T. Fujii, M. Kohtoku. Over 67 GHz bandwidth and 1.5 V Vπ InP-based optical IQ modulator with n-i-p-n heterostructure. J. Lightwave Technol., 35, 1450(2017).
[5] S. Wolf, H. Zwickel, C. Kieninger, Y. Kutuvantavida, M. Lauermann, J. Lutz, L. Altenhain, R. Schmid, W. Freude, C. Koos, S. Randel. Silicon-organic hybrid (SOH) IQ modulator for 100 GBd 16QAM operation. Optical Fiber Communication Conference, Th5C.1(2017).
[6] C. Haffner, D. Chelladurai, Y. Fedoryshyn, A. Josten, B. Baeuerle, W. Heni, T. Watanabe, T. Cui, B. Cheng, S. Saha, D. L. Elder, L. Dalton, A. Boltasseva, V. M. Shalaev, N. Kinsey, J. Leuthold. Low-loss plasmon-assisted electro-optic modulator. Nature, 556, 483(2018).
[7] L. Cai, Y. Wang, H. Hu. Low-loss waveguides in a single-crystal lithium niobate thin film. Opt. Lett., 40, 3013(2015).
[8] P. Weigel, J. Zhao, K. Fang, H. Al-Rubaye, D. Trotter, D. Hood, J. Mudrick, C. Dallo, A. Pomerene, A. Starbuck, C. DeRose, A. Lentine, G. Rebeiz, S. Mookherjea. Bonded thin film lithium niobate modulator on a silicon photonics platform exceeding 100 GHz 3-dB electrical modulation bandwidth. Opt. Express, 26, 23728(2018).
[9] M. He, M. Xu, Y. Ren, J. Jian, Z. Ruan, Y. Xu, S. Gao, S. Sun, X. Wen, L. Zhou, L. Liu, C. Guo, H. Chen, S. Yu, L. Liu, X. Cai. High-performance hybrid silicon and lithium niobate Mach–Zehnder modulators for 100 Gbit s−1 and beyond. Nat. Photonics, 13, 359(2019).
[10] M. Xu, M. He, Y. Zhu, L. Liu, L. Chen, S. Yu, X. Cai. Integrated thin film lithium niobate Fabry–Perot modulator [Invited]. Chin. Opt. Lett., 19, 060003(2021).
[11] Z. Wang, C. Wu, Z. Fang, M. Wang, J. Lin, R. Wu, J. Zhang, J. Yu, M. Wu, W. Chu, T. Lu, G. Chen, Y. Cheng. High-quality-factor optical micro-resonators fabricated on lithium niobate thin film with an electro-optical tuning range spanning over one free spectral range [Invited]. Chin. Opt. Lett., 19, 060002(2021).
[12] K. Zhang, Z. Chen, H. Feng, W. Wong, E. Y.-B. Pun, C. Wang. High-Q lithium niobate microring resonators using lift-off metallic masks [Invited]. Chin. Opt. Lett., 19, 060010(2021).
[13] C. Wang, M. Zhang, X. Chen, M. Bertrand, A. Shams-Ansari, S. Chandrasekhar, P. Winzer, M. Loncar. Integrated lithium niobate electro-optic modulators operating at CMOS-compatible voltages. Nature, 562, 101(2018).
[14] M. Xu, M. He, H. Zhang, J. Jian, Y. Pan, X. Liu, L. Chen, X. Meng, H. Chen, Z. Li, X. Xiao, S. Yu, S. Yu, X. Cai. High-performance coherent optical modulators based on thin-film lithium niobate platform. Nat. Commun., 11, 3911(2020).
[15] P. Kharel, C. Reimer, K. Luke, L. He, M. Zhang. Breaking voltage–bandwidth limits in integrated lithium niobate modulators using micro-structured electrodes. Optica, 8, 357-363(2021).
[16] X. Liu, B. Xiong, C. Sun, J. Wang, Z. Hao, L. Wang, Y. Han, H. Li, J. Yu, Y. Luo. Wideband thin-film lithium niobate modulator with low half-wave-voltage length product. Chin. Opt. Lett., 19, 060016(2021).
[17] K. Luke, P. Kharel, C. Reimer, L. He, M. Loncar, M. Zhang. Wafer-scale low-loss lithium niobate photonic integrated circuits. Opt. Express, 28, 24452(2020).
[18] G. Ulliac, V. Calero, A. Ndao, F. I. Baida, M.-P. Bernal. Argon plasma inductively coupled plasma reactive ion etching study for smooth sidewall thin film lithium niobate waveguide application. Opt. Mat., 53, 1(2016).
[19] A. J. Mercante, P. Yao, S. Shi, G. Schneider, J. Murakowski, D. W. Prather. 110 GHz CMOS compatible thin film LiNbO3 modulator on silicon. Opt. Express, 24, 15590(2016).
[20] A. Mercante, S. Shi, P. Yao, L. Xie, R. Weikle, D. Prather. Thin film lithium niobate electro-optic modulator with terahertz operating bandwidth. Opt. Express, 26, 14810(2018).
[21] Y. Liu, H. Li, J. Liu, S. Tan, Q. Lu, W. Guo. Low Vπ thin-film lithium niobate modulator fabricated with photolithography. Opt. Express, 29, 6320(2021).
