• Chinese Optics Letters
  • Vol. 9, Issue 2, 023102 (2011)
Moyan Tan1, Haochuan Li1, Qiushi Huang1, Hongjun Zhou2, Tonglin Huo2, Xiaoqiang Wang1, and Jingtao Zhu1
Author Affiliations
  • 1Shanghai Key Laboratory of Special Artificial Microstructure Materials and Technology, Institute of Precision Optical Engineering, Physics Department, Tongji University, Shanghai 200092, China
  • 2National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei 230029, China
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    DOI: 10.3788/COL201109.023102 Cite this Article Set citation alerts
    Moyan Tan, Haochuan Li, Qiushi Huang, Hongjun Zhou, Tonglin Huo, Xiaoqiang Wang, Jingtao Zhu. Mo/Si aperiodic multilayer broadband reflective mirror for 12.5–28.5-nm wavelength range[J]. Chinese Optics Letters, 2011, 9(2): 023102 Copy Citation Text show less

    Abstract

    Aperiodic molybdenum/silicon (Mo/Si) multilayer designed as a broadband reflective mirror with mean reflectivity of 10% over a wide wavelength range of 12.5–28.5 nm at incidence angle of 5? is developed using a numerical optimized method. The multilayer is prepared using direct current magnetron sputtering technology. The reflectivity is measured using synchrotron radiation. The measured mean reflectivity is 7.0% in the design wavelength range of 12.5–28.5 nm. This multilayer broadband reflective mirror can be used in extreme ultraviolet measurements and will greatly simplify the experimental arrangements.
    Moyan Tan, Haochuan Li, Qiushi Huang, Hongjun Zhou, Tonglin Huo, Xiaoqiang Wang, Jingtao Zhu. Mo/Si aperiodic multilayer broadband reflective mirror for 12.5–28.5-nm wavelength range[J]. Chinese Optics Letters, 2011, 9(2): 023102
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