[1] UCHINO K,GINIEWICZ J.Micromechatronics(1th Edition)[M].New York:Marcel Dekker,2003.
[2] GILBERTSON R G,BUSCH J D.A survey of micro-actuator technologies for future spacecraft missions[J].The Journal of The British Interplanetary Society,1996,49:129-138.
[7] CHOI Y H,LOVE C C,CHUNG Y G,et al..Production of nuclear transfer horse embryos by piezo-driven injection of somatic cell nuclei and activation with stallion sperm cytosolic extract[J].Biology of Reproduction,2002,67:561-567.
[8] GIESSIBL F J.Advances in atomic force microscopy[J].Reviews of Modern Physics,2003,75:949-983.
[9] OKAZAKI Y,MISHIMA N,ASHIDA K.Microfactory-concept,history,and developments[J].Transactions of the ASME:Journal of Manufacturing Science and Engineering,2004,126:837-844.
[10] MOTOKI T,GAO W,KIYONO S,et al..A nanoindentation instrument for mechanical property measurement of 3D micro/nano-structured surfaces[J].Measurement Science and Technology,2006,17:495-499.