• Optics and Precision Engineering
  • Vol. 11, Issue 4, 368 (2003)
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  • [in Chinese]
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    DOI: Cite this Article
    [in Chinese], [in Chinese]. [J]. Optics and Precision Engineering, 2003, 11(4): 368 Copy Citation Text show less
    References

    [5] LUTZ W G, MEYERS G F. Applications of atomic force microscopy in optical disc technology[EB/OL].http://www.veeco.com/appnotes/AN18_CD DVD.pdf.

    [6] FRANKY K L Fan, YEUNG Dr S M S, WILLIAM M C Ng. Cloud elimination in DVD production[J]. Tape Disc Business,1998,28(9):25-32.

    [7] FRANKY K L Fan. Towards shorter replication cycle time[J]. Tape Disc Business, 1997,27(2):20-26.

    [8] Molecular device and tools for nanotechnology. SPM Analysis of the CD/DVD Discs[EB/OL]. http://www.ntmdt.ru/Application-Notes/Science_Technology_Applications/Data_storage/SPM_analysis_of_the_CDDVD_discs/text24.html

    [9] CHERNOFF D A, BURKHEAD D L. Automated, high precision measurement of critical dimensions using the atomic force microscopy[J]. J Vac Sci Technol,1999,A17:1457-1462.

    [10] CHERNOFF D A, BURKHEAD D L. AFM length analysis of data marks: measuring jitter, asymmetry, process noise and process position[J]. SPIE,2001,4342:13-22.

    [11] COOK C S, CHERNOFF D A, BURKHEAD D L. Automated analysis of data mark microstructure of various media in the optical disc industry[J]. SPIE,2000,4090:16-25.