• Optics and Precision Engineering
  • Vol. 31, Issue 15, 2248 (2023)
Miaomiao YU1, Zhankun WENG1,2,*, Guanqun WANG1, Chuanchuan GUO1..., Junting HU1 and Zuobin WANG1|Show fewer author(s)
Author Affiliations
  • 1International Research Centre for Nano Handling and Manufacturing of China, Changchun University of Science and Technology, Changchun30022, China
  • 2School of Mechatronic Engineering and Automation, Foshan University, Foshan585, China
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    DOI: 10.37188/OPE.20233115.2248 Cite this Article
    Miaomiao YU, Zhankun WENG, Guanqun WANG, Chuanchuan GUO, Junting HU, Zuobin WANG. Rapid fabrication of patterned Cu micro-nano structure by laser ablation in liquid[J]. Optics and Precision Engineering, 2023, 31(15): 2248 Copy Citation Text show less
    Schematic diagram of patterned Cu micro-nano structure prepared by laser ablation
    Fig. 1. Schematic diagram of patterned Cu micro-nano structure prepared by laser ablation
    SEM images of Cu micro-nano structure prepared at scanning speed of 100 mm/s with different laser powers(Illustration is Fast Fourier Transform spectrum)
    Fig. 2. SEM images of Cu micro-nano structure prepared at scanning speed of 100 mm/s with different laser powers(Illustration is Fast Fourier Transform spectrum)
    SEM images of Cu micro-nano structure prepared at laser power of 2 W with different scanning speeds (Illustration is a Fast Fourier Transform spectrum)
    Fig. 3. SEM images of Cu micro-nano structure prepared at laser power of 2 W with different scanning speeds (Illustration is a Fast Fourier Transform spectrum)
    SEM images of Cu micro-nano structure prepared with different scanning times at laser power of 2 W and scanning speed of 50 mm/s(illustration is Fast Fourier Transform spectrum)
    Fig. 4. SEM images of Cu micro-nano structure prepared with different scanning times at laser power of 2 W and scanning speed of 50 mm/s(illustration is Fast Fourier Transform spectrum)
    EDS and element mapping images of Cu micro-nano structure prepared by scanning 4 times
    Fig. 5. EDS and element mapping images of Cu micro-nano structure prepared by scanning 4 times
    XRD spectra of patterned Cu micro-nano structure
    Fig. 6. XRD spectra of patterned Cu micro-nano structure
    Evolution of patterned Cu micro-nano structure by laser ablation in liquid
    Fig. 7. Evolution of patterned Cu micro-nano structure by laser ablation in liquid
    Schematic of droplets on superhydrophobic surfaces with low adhesion (Cassie-Baxter state) and high adhesion (Cassie-impregnating state)
    Fig. 8. Schematic of droplets on superhydrophobic surfaces with low adhesion (Cassie-Baxter state) and high adhesion (Cassie-impregnating state)
    Water contact angle and oil contact angle of patterned Cu micro-nano structure with different scanning times
    Fig. 9. Water contact angle and oil contact angle of patterned Cu micro-nano structure with different scanning times
    Shape of droplets when patterned Cu micro-nano structure were vertical and inverted
    Fig. 10. Shape of droplets when patterned Cu micro-nano structure were vertical and inverted
    扫描次数粒径占比/%
    <200 nm200~500 nm>500 nm
    197.32.40.3
    294.84.01.2
    392.95.81.3
    491.27.71.1
    589.97.92.2
    687.08.84.2
    786.89.83.4
    884.011.94.1
    982.113.34.6
    1076.418.25.4
    Table 1. Effect of scanning times on particle size in center of laser spot
    扫描次数Ra标准偏差
    10.20.01
    20.40.02
    30.50.01
    40.80.03
    50.90.03
    61.30.11
    71.50.04
    81.20.03
    91.00.06
    100.70.09
    Table 2. Effect of roughness of patterned Cu micro-nano structure on different scanning times
    Miaomiao YU, Zhankun WENG, Guanqun WANG, Chuanchuan GUO, Junting HU, Zuobin WANG. Rapid fabrication of patterned Cu micro-nano structure by laser ablation in liquid[J]. Optics and Precision Engineering, 2023, 31(15): 2248
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