• Chinese Optics Letters
  • Vol. 2, Issue 9, 09541 (2004)
Daohong Yang1、2、*, Chen Xu1、2, and Guangdi Shen1、2
Author Affiliations
  • 1College of Electronic Information &
  • 2Control Engineering, Beijing University of Technology, Beijing Optoelectronic Technology Laboratory, Beijing 100022
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    Daohong Yang, Chen Xu, Guangdi Shen. Avoiding silicon/glass bonding damage with fusion bonding method[J]. Chinese Optics Letters, 2004, 2(9): 09541 Copy Citation Text show less
    References

    [1] T. Rogers and J. Kowal, Sensors and Actuators A 46, 113 (1995).

    [2] E. T. Enikov and J. G. Boyd, International J. Engineering Science 38, 135 (2000).

    [3] X. Chauffleur, G. Blasquez, and P. Pons, Sensors and Actuators A 46, 121 (1995).

    [4] G. Blasquez and P. Favaro, Sensors and Actuators A 101, 156 (2002).

    [5] J.-T. Huang and H.-A. Yang, Sensors and Actuators A 102, 1 (2002).

    [6] U. M. Mescheder, M. Alavi, and K. Hiltmann, Sensors and Actuators A 97, 422 (2002).

    Daohong Yang, Chen Xu, Guangdi Shen. Avoiding silicon/glass bonding damage with fusion bonding method[J]. Chinese Optics Letters, 2004, 2(9): 09541
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