[1] ZHOU T, YANG M, JIANG K, et al. MMW radar-based technologies in autonomous driving: A review [J]. Sensors (Basel), 2020, 20(24):7283.
[2] LI R, DU Z, ZHAO Y, et al. Design and implementation of mobile robot ultrasonic localization system [C]∥Yinchuan, China:2016 Chinese Control and Decision Conference (CCDC), 2016: 5347-5352.
[3] CHO S H. Improving measurement range of infrared proximity sensor using multiple exposure output and HDR technique [J]. Journal of IKEEE, 2018, 22(4): 907-915.
[4] COSTA D G. Visual sensors hardware platforms: A review [J]. IEEE Sens J, 2020, 20(8): 4025-4033.
[5] REN D, SUN Y, SHI J, et al. A review of transparent sensors for photoacoustic imaging applications [J]. NA, 2021, 8(8): 324.
[6] WANG R, CHEN L, WANG J, et al. Research on autonomous navigation of mobile robot based on multi ultrasonic sensor fusion [C]∥Chongqing, China: 2018 IEEE 4th Information Technology and Mechatronics Engineering Conference (ITOEC), 2018: 720-725.
[8] CIUFFREDA I, CASACCIA S, REVEL G M. A multi-sensor fusion approach based on PIR and ultrasonic sensors installed on a robot to localise people in indoor environments [J]. Sensors,2023,23(15):6963.
[9] REN J, HONG X. Multi-view reconstruction fusing ultrasonic phased array and camera for mobile robots in simulation environment [J]. IEEE Access, 2024, 12: 13860-13869.
[10] ZAMORA I, LEDESMA E, URANGA A, et al. Miniaturized 0.13 m CMOS front-end analog for AlN PMUT arrays [J]. Sensors (Basel), 2020, 20(4):1205.
[11] BIRJIS Y, SWAMINATHAN S, NAZEMI H, et al. Piezoelectric micromachined ultrasonic transducers (PMUTs): Performance metrics, advancements, and applications [J]. Sensors (Basel),2022,22(23):9151.
[12] MOISELLO E, NOVARESI L, SARKAR E, et al. PMUT and CMUT devices for biomedical applications: A review [J]. IEEE Access,2024,12:18640-18657.
[13] MURALT P, BABOROWSKI J. Micromachined ultrasonic transducers and acoustic sensors based on piezoelectric thin films [J]. J Electroceram, 2004, 12: 101-108.
[14] HEYWANG W, LUBITZ K, WERSING W. Piezoelectricity: evolution and future of a technology [M]. Heidelberg：Springer Science & Business Media, 2008.
[15] PAN J, BAI C, ZHENG Q, et al. Review of piezoelectric micromachined ultrasonic transducers for rangefinders [J]. Micromachines, 2023, 14(2): 374.
[16] QIU Y, GIGLIOTTI J V, WALLACE M, et al. Piezoelectric micromachined ultrasound transducer (PMUT) arrays for integrated sensing, actuation and imaging [J]. Sensors, 2015, 15(4): 8020-8041.
[17] QU M, CHEN X, YANG D, et al. Monitoring of physiological sounds with wearable device based on piezoelectric MEMS acoustic sensor [J]. J Micromechanic Microengineer, 2021, 32(1): 014001.
[19] PARRILLA M, ANAYA J, FRITSCH C. Digital signal processing techniques for high accuracy ultrasonic range measurements [J]. IEEE Trans Instrum Meas, 1991, 40(4): 759-763.
