[1] QIU ZH Y, ZHANG T, LU CH H.Overview of friction compensation control in table servo feed systems of CNC tools ［J］.Modern Manufacturing Engineering, 2006(1):21-25.(in Chinese)

[2] CHEN T, CHEN J, JIANG F H.Two low-speed nonlinear compensations for servo system［J］. Opt.Precision Eng., 2003,11(1)：94-97.(in Chinese)

[3] LU L, GUO Y, TACHIKAWA, et al..High-gain PID controller for nanometer positioning ［J］.Opt.Precision Eng., 2007,15(1)：63-68.(in Chinese)

[4] PHILIP B F, DAVID T.Friction: an Introduction to Tribology［M］.New York: Anchor Press/Doubleday, 1973.

[5] ZENG P, WEN J M, CHENG G M, et al..Research on novel inertial piezoelectric actuator ［J］.Opt.Precision Eng., 2006,14(4)：623-627.(in Chinese)

[6] ISRAELACHVILI J N.Intermolecular and Surface Forces ［M］.New York: Academic, 1995.

[7] RABINOWICZ E.Friction and Wear of Materials［M］.New York: Wiley, 1995.

[8] WANG Y, XIONG ZH H, DING H, et al..Adaptive state observer based on friction compensation for high-precision control ［J］.Natural science development, 2005,9(15):1100-1105.(in Chinese)

[9] STRIBECK R.Die wesentlichen eigenschaften der gleit-und rollenlager-the key qualities of sliding and roller bearings［J］.Zeitschrift des Vereins Deutscher Ingenieure, 1902,46(38-39):1342-1348, 1432-1437.

[10] LAMPAERT V, BENDER F, SWEVERS J.Ageneralized Maxwell-slip friction model appropriate for control purposes［J］.Physics and Control, 2003,4(20):1170-1177.

[11] JOHAN K, CANUDAS C.Revisiting the LuGre friction model［J］.Control Systems Magazine, IEEE, 2008,12(1):101-114.

[12] ZHANG W J.Parameter identification of LuGre friction model in servo system based on improved article swarm optimization algorithm［C］.Control Conference, 2007:135-139.

[13] VARGAS F, EDSON R.Identification and friction compensation for an industrial robot using two degrees of freedom controllers［C］.Control Automation Robotics and Vision Conference, 2004,2:1146 -1151.