Jinpeng ZHANG, Fen GAO, Bing LI. Transient Interferometry of Ultra Precision Surface Based on Small Hole Point Diffraction[J]. Acta Photonica Sinica, 2022, 51(4): 0412004
- Acta Photonica Sinica
- Vol. 51, Issue 4, 0412004 (2022)
Fig. 1. Optical path layout of ultra precision surface transient interferometry system based on small hole point diffraction
Fig. 2. Experimental system of pinhole point diffraction transient interferometry
Fig. 3. Four instantaneous phase-shift interference fringes in a single frame which collected in experiment
Fig. 4. Surface measurement results
Fig. 5. The distribution of PV and RMS values in 10 groups of repetitive experiments
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Table 1. Comparison of measurement results between point diffraction transient interferometry system and ZYGO spherical interferometer
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