Fabrication of lithium niobate metasurfaces via a combination of FIB and ICP-RIE

Chunyan Jin; Wei Wu; Lei Cao; Bofeng Gao; Jiaxin Chen; Wei Cai; Mengxin Ren; Jingjun Xu

doi:10.3788/COL202220.113602

Journals >Chinese Optics Letters >Volume 20 >Issue 11 >Page 113602 > Article

Chinese Optics Letters
Vol. 20, Issue 11, 113602 (2022)

Fabrication of lithium niobate metasurfaces via a combination of FIB and ICP-RIE

Chunyan Jin¹, Wei Wu^1、*, Lei Cao¹, Bofeng Gao¹, Jiaxin Chen², Wei Cai^1、**, Mengxin Ren^1、3、***, and Jingjun Xu^1、****

Author Affiliations

¹Key Laboratory of Weak-Light Nonlinear Photonics, Ministry of Education, School of Physics and TEDA Applied Physics Institute, Nankai University, Tianjin 300071, China

²Science and Technology on Electro-Optical Information Security Control Laboratory, Tianjin 300308, China

³Collaborative Innovation Center of Extreme Optics, Shanxi University, Taiyuan 030006, China

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DOI: 10.3788/COL202220.113602 Cite this Article Set citation alerts

Chunyan Jin, Wei Wu, Lei Cao, Bofeng Gao, Jiaxin Chen, Wei Cai, Mengxin Ren, Jingjun Xu. Fabrication of lithium niobate metasurfaces via a combination of FIB and ICP-RIE[J]. Chinese Optics Letters, 2022, 20(11): 113602 Copy Citation Text

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