• Acta Photonica Sinica
  • Vol. 49, Issue 3, 0316002 (2020)
Si-yu WANG, Ying XU, and Yu-chun LIU*
Author Affiliations
  • Laboratory of Integrated Opto-Mechanics and Electronics, School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China
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    DOI: 10.3788/gzxb20204903.0316002 Cite this Article
    Si-yu WANG, Ying XU, Yu-chun LIU. Enhanced Photoluminescence of Transferred Monolayer MoS2 via Sulfur Vapor Treatment[J]. Acta Photonica Sinica, 2020, 49(3): 0316002 Copy Citation Text show less

    Abstract

    Monolayer molybdenum disulfide (MoS2) was prepared on the SiO2/Si substrate by Chemical Vapor Deposition (CVD) method, and then treated with sulfur vapor at 300℃ after the monolayer MoS2 transferred to desired substrate by polymethyl methacrylate. The morphology and photoluminescence properties of the samples were characterized by Atomic Force Microscopy (AFM), vacuum fluorescence detection and Raman spectroscopy. The results show that the photoluminescence intensity of the transferred monolayer MoS2 after sulfur vapor treatment is about 5 times higher than that of the untreated monolayer MoS2 prepared by CVD. This photoluminescence enhancement effect is due to that part of the sulfur vacancies of the monolayer MoS2 are filled by the sulfur atom nanoclusters during the sulfur vapor treatment, thereby improving the photoluminescence efficiency. In addition, similar photoluminescence enhancement is observed after sulfur treatment were observed in the monolayer MoS2 transferred to SiO2/Si substrate, quartz, alumina, and magnesium fluoride substrates, respectively.
    Si-yu WANG, Ying XU, Yu-chun LIU. Enhanced Photoluminescence of Transferred Monolayer MoS2 via Sulfur Vapor Treatment[J]. Acta Photonica Sinica, 2020, 49(3): 0316002
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