Optical performance, structure and thermal stability of Al(1wt.-%Si)/Zr and Al(pure)/Zr multilayers designed for the 17–19 nm range

Qi Zhong; Wenbin Li; Zhong Zhang; Jingtao Zhu; Qiushi Huang; Haochuan Li; Zhanshan Wang; Philippe Jonnard; Karine Le Guen; Yanyan Yuan; Jean-Michel Andre; Hongjun Zhou; Tonglin Huo

doi:10.3788/col201311.s10603

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