Ran Bing, Yang Ping, Wen Lianghua, Yang Kangjian, Wang Shuai, Du Rui, Xu Bing. Analysis and Compensation of Reaction Force in Large-Aperture Piezoelectric Fast Steering Mirror[J]. Chinese Journal of Lasers, 2020, 47(6): 601007
- Chinese Journal of Lasers
- Vol. 47, Issue 6, 601007 (2020)
Fig. 1. Physical model of rigid-flexible coupling multibody system of PFSM. (a) Rigid-flexible coupling model; (b) flexure hinge model and corresponding coupling nodes
Fig. 2. Modal shapes of PFSM central flexure hinge. (a) Seventh mode shape; (b) eighth mode shape;(c) ninth mode shape; (d) tenth mode shape
Fig. 3. Sinusoidal signal of piezoelectric actuator and hot spot stress of central hinge.(a) Sinusoidal displacement signal of piezoelectric actuator; (b) hot spot stress of central hinge
Fig. 4. Reaction force characteristics of PFSM at different driving frequencies.(a) 50 Hz; (b) 80 Hz; (c) 100 Hz; (d) 120 Hz
Fig. 5. Mesh model of actuator and deflection shape of PFSM. (a) Finite element mesh model and voltage loading model of actuator; (b) deflection shape of PFSM
Fig. 6. Reaction force based on piezoelectric coupling simulation. (a) 50 Hz; (b) 80 Hz; (c) 100 Hz; (d) 120 Hz
Fig. 7. Reaction force of PFSM before and after compensation based on piezoelectric coupling calculation. (a) 50 Hz; (b) 80 Hz; (c) 100 Hz; (d) 120 Hz
Fig. 8. 320 mm aperture PFSM with reaction force test system. (a) 320 mm aperture PFSM; (b) reaction force test system
Fig. 9. Tested reaction force before and after compensation. (a) 50 Hz; (b) 80 Hz; (c) 100 Hz; (d) 120 Hz
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