Design and fabrication of the star coupler based on SOI material

Xiaoqing Jiang; Baiyang Li; Yanzhe Tang; Jianyi Yang; Minghua Wang; Wenhui Wang; Yirong Yang; Yaming Wu; Yuelin Wang

Journals >Chinese Optics Letters >Volume 1 >Issue 8 >Page 08465 > Article

Chinese Optics Letters
Vol. 1, Issue 8, 08465 (2003)

Design and fabrication of the star coupler based on SOI material

Xiaoqing Jiang^1、*, Baiyang Li¹, Yanzhe Tang¹, Jianyi Yang¹, Minghua Wang¹, Wenhui Wang², Yirong Yang², Yaming Wu², and Yuelin Wang^1、2

Author Affiliations

¹Department of Information Science and Electronic Engineering, Zhejiang University, Hangzhou 310027

²State Key Laboratories of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050

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Xiaoqing Jiang, Baiyang Li, Yanzhe Tang, Jianyi Yang, Minghua Wang, Wenhui Wang, Yirong Yang, Yaming Wu, Yuelin Wang. Design and fabrication of the star coupler based on SOI material[J]. Chinese Optics Letters, 2003, 1(8): 08465 Copy Citation Text

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Abstract

A 1 × 25 star coupler is designed through calculation and beam propagation method (BPM) simulation. Improvement methods are focused on the design of the tapered waveguides in the device, improving the uniformity of the output light power of the star coupler. Utilizing the conventional Si process technology, the device is fabricated based on silicon-on-insulator (SOI) material. The test result shows that the star coupler has a perfect function of power splitting.

Keywords

130.3120 230.1360 beam splitters integrated optics devices

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