• Infrared and Laser Engineering
  • Vol. 50, Issue 2, 20200392 (2021)
Qi Wang1, Yongming Qian1, and Shulian Zhang2
Author Affiliations
  • 1School of Mechanical Engineering, Nantong University, Nantong 226019, China
  • 2State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instruments, Tsinghua University, Beijing 100084, China
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    DOI: 10.3788/IRLA20200392 Cite this Article
    Qi Wang, Yongming Qian, Shulian Zhang. Thermal drift of frequency difference of frequency splitting laser with force-exerting[J]. Infrared and Laser Engineering, 2021, 50(2): 20200392 Copy Citation Text show less

    Abstract

    The force-exerting laser with tunable frequency difference has a broad application prospect, there are few reports on the thermal drift of frequency difference of this laser, but it is an important application index, especially for the interferometer of lithography machine. The frequency difference of birefringence Zeeman dual frequency laser was assigned through elastic force method, and its states of frequency difference in the drift stage, transition stage and stable stage were observed. The experiments prove that the stability of frequency difference is better than 23 kHz/h, and its repeatability is better than 130 kHz; In addition, this paper also comparatively analyzed the influences of elastic force-exerting elements with different structures or materials on frequency difference. The experiments indicate that the uniformity and stability of the temperature distribution play an important role in the frequency difference thermal drift.
    Qi Wang, Yongming Qian, Shulian Zhang. Thermal drift of frequency difference of frequency splitting laser with force-exerting[J]. Infrared and Laser Engineering, 2021, 50(2): 20200392
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