[1] H. J. Tiziani, S. Reichelt, C. Pruss, M. Rocktashel, and U. Hofbauer, Proc. SPIE 4440, 109 (2001).
[2] W. H. Wong and E. Y. B. Pun, J. Vac. Sci. Technol. B 19, 732 (2001).
[3] I. Steingoerrer, A. Grosse, and H. Fouckhardt, Proc. SPIE 4984, 234 (2003).
[4] Z. Gao, M. Kong, R. Zhu, and L. Chen. Chin. Opt. Lett. 5, 241 (2007).
[5] E. Bernhard Kley, W. Rockstroh, H. Schmidt, A. Drauschke, F. Wyrowski, and L. Witting, Proc. SPIE 4440, 135 (2001).
[6] A. Fercher, Opt. Acta 23, 347 (1976).
[7] I. Kallioniemi, J. Saarinen, K. Blomstedt, and J. Turunen, Appl. Opt. 36, 7217 (1997).
[8] Z. Chen, Y. Vladimirsky, M. Brown, Q. Leonard, O. Vladimirsky, F. Moore, B. Lai, W. Yun, and E. Gluskin, J. Vac. Sci. Technol. B 15, 2522 (1997).
[9] S. M. Arnold, Proc. SPIE 2536, 117 (1995).
[10] H. P. Herzig, (ed.) Micro-Optics: Elements, Systems and Applications (Taylor & Francis Ltd., London, 1997, Reprinted 1998) p.30.
[11] Y. Chang and J. H. Burge, Proc. SPIE 3782, 358 (1999).
