Linearity Analysis on Bellows Actuator of a Fine Objective Lens

YUAN Wen-quan; GONG Yan; ZHANG Wei; WANG Xue-liang; NI Ming-yang; ZHAO Lei

doi:10.3788/gzxb20114010.1526

[1] DAVIES R. Adaptive optics: Observations and prospects for studies of active Galactic Nuclei［J］. New Astronomy Reviews, 2008, 52(6): 307-322.

[2] LIN Xu-dong, CHEN Tao, WANG Jian-li, et al. Co-focus experiment of segmented-mirror active optics［J］. Optics and Precision Engineering, 2010, 18(3): 563-569.

[3] LIN Xu-dong, WANG Jian-li, LIU Xin-yue, et al. Co-phase experiment of active optics for segmented-mirrors［J］. Optics and Precision Engineering, 2010, 18(7): 1520-1528.

[4] WANG Fu-guo, LI Hong-zhuang, YANG Fei. Ability of the thin mirror active optics to correct optical astigmation［J］. Acta Photonica Sinica, 2010, 39(5): 871-875.

[5] ZHOU Chao, YANG Hong-bo, WANG Fu-guo, et al. Finite element analysis on the capability of fitting aberration of deformable mirrors［J］. Acta Photonica Sinica, 2010, 39(8): 1461-1465.

[6] MICHAEL F M, DAVID G T, DANIEL N G. Apparatus, system, and method for precision positioning and alignment of a lens in an optical system: US, 6760167［P］. 2004-07-06.

[7] FERNAND B, MAURICE B, DANIEL T. Control of a planar fine positioned actuated by metal bellows［J］. Automatica, 1994, 30(11): 1677-1691.

[8] PRELLE C, JUTARD A, BETEMPS M. Compliance adjustment of a metal bellows actuator by control law parameters［J］. Mechatronics, 2001, 11(6): 631-647.

[9] KENJI K, TAKESHI A, KOTARO T, et al. Development of coarse/fine dual stage using pneumatically driven bellows actuator and cylinder with air bearings［J］. Precision Engineering, 2010, 34(3): 526-533.

[10] HU Liang. Method and application of U-shaped bellows stiffness calculation［J］. Journal of Shanghai University(natural science), 1995, 1(1): 26-35.

[11] HU Chang-ying, WANG Zhi-wei. Integral equations, iterative algorithm of U-shaped bellows at a large deflection［J］. Chinese Journal of Applied Mechanics, 2001, 18(1): 19-26.

[12] WANG Yong-gang, DAI Shi-liang, LU Ying-min. Nonlinear analysis on bellows of oil tank［J］. Chinese Journal of Applied Mechanics, 2002, 19(3): 35-39.

[13] KANG H W, LEE I H, CHO D W. Developmet of a micro-bellows actuator using micro-stereolithography technology［J］. Microelectronic Engineering, 2006, 83: 1201-1204.

[15] YANG Yi-jun, WANG Xin-feng. Nonlinear finite element analysis of the multiply bellows［J］. Journal of Pressure Equipment and Systems, 2003, 20(9): 13-16.

[16] CHEN Ye, LI Yong-sheng, GU Bo-qin, et al. The finite element analysis to the U-shape bellows by the ANSYS program［J］. Journal of Pressure Equipment and Systems, 2000, 17(3): 34-36 .

[17] ZHANG Bing, WANG Xing-feng. Stability of bellows analysis with nonlinear finite element method［J］. Journal of Pressure Equipment and Systems, 2001, 18(1): 40-44.