Guo Minchao, Wang Mingdi, Zhang Shengjiang, Lin Yao, Wang Xinyue, Yin Zihang, Wang Xianbao. Techniques for Femtosecond Laser Processing of Micro-Holes in FR-4 Copper Clad Laminate[J]. Chinese Journal of Lasers, 2020, 47(12): 1202008
- Chinese Journal of Lasers
- Vol. 47, Issue 12, 1202008 (2020)
Fig. 1. Basic processes and time scales of interaction between femtosecond laser and metal materials
Fig. 2. Model for interaction between femtosecond laser and polymer material
Fig. 3. Effect of single pulse energy on inlet diameter, outlet diameter and taper of micro-hole
Fig. 4. Inlet and outlet SEM images under different single pulse energies. (a) 5μJ; (b) 30μJ
Fig. 5. Effect of repetition rate on inlet diameter, outlet diameter and taper of micro-hole
Fig. 6. Local inlet SEM images under different repetition rates. (a) 80kHz; (b) 160kHz
Fig. 7. Effect of number of pulses on inlet diameter, outlet diameter and taper of micro-hole
Fig. 8. Inlet SEM images under different numbers of pulses. (a) 1000; (b) 3000
Fig. 9. Locally enlarged inlet images under different numbers of pulses. (a) 1000; (b) 3000
Fig. 10. Effect of defocusing amount on inlet diameter, outlet diameter and taper of micro-hole
Fig. 11. Roundness of micro-hole under different defocusing amounts. (a) -0.05mm; (b) 0.05mm
Fig. 12. Schematic of traditional PCB board circuit. (a) Overall circuit; (b) local circuit
Fig. 13. Processing pictures. (a) Processing window; (b) micro-hole inlet morphology; (c) micro-hole outlet morphology
Fig. 14. Three-dimensional morphology of line end
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Table 1. Main performance parameters of femtosecond laser
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Table 2. Element arrangement and results of single factor test
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Table 3. Factor levels
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Table 4. Element arrangement and results of orthogonal test
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Table 5. Range analysis
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