[3] Chen C Y,Chao C Y,Gurtler S,et al. Silicon surface grating formation with high power UV laser. Proceedings of SPIE, 1999,3862:508~513
[4] Ang T W,Reed G T,Vonsovici A,et al. Grating couplers using silicon-on-insulator.SPIE,1999,3620:79~86
[5] Darjushkin A,Karavanskii V,Korovin S,et al. Diffraction gratings formation on porous silicon using CO2 laser.SPIE,1996,2777:53~58
[6] Nee J T,Lau K Y,Muller R S. Scanning blazed-gratings for high-resolution spectroscopy.1998 Workshop on Solid State Sensors and Actuators, Late-News Poster Session, Hilton Head Island, SC, USA, June 8-11, 1998
[7] Harada T,Sakuma H,Fuse M. Fabrication of blazed gratings and grisms utilizing anisotropic etching of silicon.Proc of SPIE,1998,3450:11~16
[8] Yang L J,Chang P,Lee C K,et al. A new method to fabricate diffractive blazed gratings by anisotropic etching on (110) silicon wafers.Proceedings of SPIE,1997,3242:46~51