The experimental research of optical channel waveguides in Z-LiNbO3 crystals using femtosecond pulses is performed on Ti sapphire laser system, the wavelength and the repetition rate of it are 800 nm and 76 MHz. By using the focusing lens with 40 magnification, o.65 numerical aperture (NA), the effect of fabrication parameters, for example laser scanning speed, repeat time on writing quality and the characters of relative microstructures are analyzed and studied in theory. Also the distribution is measured by the beam profiler. The result shows that the propagation of optical waveguide could achieve ideal effect when the pulse energy is under 250 mW, the scanning speed is 100 μm/s and the focus depth is from 350 μm to 400 μm. At last the insertion loss of 1×2 optical splitter is about 1 dB/cm.