[1] Song C C, Guan M X, Jia Y Z et al. Driving forces for ultrafast laser-induced sp2 to sp3 structural transformation in graphite[J]. NPJ Computational Materials, 9, 76(2023).
[2] Wen Q L, Wei X Y, Wang H L et al. Characteristics and mechanism of CVD single crystal diamond processed by picosecond laser[J]. Acta Photonica Sinica, 50, 0650113(2021).
[3] Ma Y P, Zhang Y, Wei C et al. Surface polishing of CVD diamond coating by femtosecond laser[J]. Optics and Precision Engineering, 27, 164-171(2019).
[4] Martínez-Calderon M, Azkona J J, Casquero N et al. Tailoring diamonds optical properties via direct femtosecond laser nanostructuring[J]. Scientific Reports, 8, 14262(2018).
[5] Lu Q, Gong H Y, Guo Q F et al. Gemological characteristic difference between colorless CVD synthetic diamonds and natural diamonds[J]. Materials, 14, 6225(2021).
[6] Kumar S, Eaton S M, Bollani M et al. Laser surface structuring of diamond with ultrashort Bessel beams[J]. Scientific Reports, 8, 14021(2018).
[7] He M F, Zhang Z M, Cao C et al. Single-color peripheral photoinhibition lithography of nanophotonic structures[J]. PhotoniX, 3, 25(2022).
[8] Chen X D, Zou C L, Gong Z J et al. Subdiffraction optical manipulation of the charge state of nitrogen vacancy center in diamond[J]. Light: Science & Applications, 4, e230(2015).
[9] Gracio J J, Fan Q H, Madaleno J C. Diamond growth by chemical vapour deposition[J]. Journal of Physics D: Applied Physics, 43, 374017(2010).
[10] Wei X Y, Wen Q L, Lu J et al. Research on parameters optimization of diamond microgrooves processed by ultravilot nanosecond laser[J]. Chinese Journal of Lasers, 49, 1002406(2022).
[11] Rath P, Kahl O, Ferrari S et al. Superconducting single-photon detectors integrated with diamond nanophotonic circuits[J]. Light: Science & Applications, 4, e338(2015).
[12] Wang C Y, Zhang F L, Kuang T C et al. Chemical/mechanical polishing of diamond films assisted by molten mixture of LiNO3 and KNO3[J]. Thin Solid Films, 496, 698-702(2006).
[13] Achard J, Tallaire A, Mille V et al. Improvement of dislocation density in thick CVD single crystal diamond films by coupling H2/O2 plasma etching and chemo-mechanical or ICP treatment of HPHT substrates[J]. Physica Status Solidi (a), 211, 2264-2267(2014).
[14] Liu X Q, Chen Q D, Guan K M et al. Dry-etching-assisted femtosecond laser machining[J]. Laser & Photonics Reviews, 11, 1600115(2017).
[15] Hicks M L, Pakpour-Tabrizi A C, Zuerbig V et al. Optimizing reactive ion etching to remove sub-surface polishing damage on diamond[J]. Journal of Applied Physics, 125, 244502(2019).
[16] Kubota A, Nagae S, Motoyama S. High-precision mechanical polishing method for diamond substrate using micron-sized diamond abrasive grains[J]. Diamond and Related Materials, 101, 107644(2020).
[17] Han Y, Ma Y P, Wang H H et al. Material removal rate of nano-diamond coating ablated by femtosecond laser[J]. Laser & Optoelectronics Progress, 58, 1114001(2021).
[18] Chen N, Yan B, Li Z J et al. Gaussian pulsed laser etching of CVD diamonds[J]. Chinese Journal of Lasers, 47, 1202007(2020).
[19] Xu H Q, Zang J B, Tian P F et al. Surface conversion reaction and high efficient grinding of CVD diamond films by chemically mechanical polishing[J]. Ceramics International, 44, 21641-21647(2018).
[20] Xiong W, Zhou Y S, Hou W J et al. Laser-based micro/nanofabrication in one, two and three dimensions[J]. Frontiers of Optoelectronics, 8, 351-378(2015).
[21] Li J Q, Yan J F, Jiang L et al. Nanoscale multi-beam lithography of photonic crystals with ultrafast laser[J]. Light: Science & Applications, 12, 164(2023).
[22] Shi Z Y, Jin Z J, Guo X G et al. Interfacial friction properties in diamond polishing process and its molecular dynamic analysis[J]. Diamond and Related Materials, 100, 107546(2019).
[23] Mi S C, Toros A, Graziosi T et al. Non-contact polishing of single crystal diamond by ion beam etching[J]. Diamond and Related Materials, 92, 248-252(2019).
[24] Komlenok M, Pashinin V, Sedov V et al. Femtosecond and nanosecond laser polishing of rough polycrystalline diamond[J]. Laser Physics, 32, 084003(2022).
[25] Qi J Y, Zhao Z Y, Liu Z J et al. Integration of cross-scale milli/microlenses by ion beam etching and femtosecond laser modification[J]. Optics Letters, 48, 2752-2755(2023).
[26] Liu X Q, Zhang Y L, Li Q K et al. Biomimetic sapphire windows enabled by inside-out femtosecond laser deep-scribing[J]. PhotoniX, 3, 1(2022).
[27] Strek W, Cichy B, Radosinski L et al. Laser-induced white-light emission from graphene ceramics-opening a band gap in graphene[J]. Light: Science & Applications, 4, e237(2015).
[28] Hu G Q, Song Y, Guan Y C. Tailoring metallic surface properties induced by laser surface processing for industrial applications[J]. Nanotechnology and Precision Engineering, 2, 29-34(2019).
[29] Liu X Q, Yu L, Yang S N et al. Optical nanofabrication of concave microlens arrays[J]. Laser & Photonics Reviews, 13, 1800272(2019).
[30] Zhang D W, Cui Y X. Surface chemical modification of CVD diamond films by laser irradiation[J]. International Journal of Refractory Metals and Hard Materials, 81, 36-41(2019).
[31] Zhang Z, Zhang Q L, Wang Q W et al. Investigation on the material removal behavior of single crystal diamond by infrared nanosecond pulsed laser ablation[J]. Optics & Laser Technology, 126, 106086(2020).