Jun YU, Zhanshan WANG, Qiushi HUANG, Zhong ZHANG, Zhenxiang SHEN, Hongfei JIAO, Pengfeng SHENG, Jingjing XIA, Yifan WANG. Ultra-precision machining and testing of reflector mirrors for extreme ultraviolet and X-ray[J]. Optics and Precision Engineering, 2022, 30(21): 2688
- Optics and Precision Engineering
- Vol. 30, Issue 21, 2688 (2022)
Fig. 1. Flow chart of surface forming technology of ultra-precision turning and fine polishing
Fig. 2. Lightweight aluminum alloy reflector manufactured by additive manufacture
Fig. 3. Surface shape of SLM aluminum alloy by direct single point turning
Fig. 4. Surface roughness of SLM aluminum alloy by direct single point turning
Fig. 5. Surface roughness of nickel-phosphorus alloy by single point turning
Fig. 6. Surface roughness after magneto-rheological polishing
Fig. 7. Surface roughness after chemical mechanical polishing
Fig. 8. Flow chart of Wolter-I microscope mandrel
Fig. 9. Single point turning mandrel
Fig. 10. In-situ measurement results of surface shape after turning
Fig. 11. Surface shape and roughness of mandrel after polishing
Fig. 12. Large size flat polishing platform and machining results
Fig. 13. 240 mm long silicon flat mirror
Fig. 14. Interferometer test results of monocrystalline silicon flat mirror after contour coating modification
Fig. 15. Test results of plane mirror after two times modification
Fig. 16. Equipment for full spatial frequency characterization platform
Fig. 17. Full spectrum characterization of monocrystalline silicon flat mirror
Fig. 18. Algorithm-based stitching interferometry
Fig. 19. Schematic diagram of transformation relation between translation rotation and off-axis rotation
Fig. 20. Test results of plane bending mirror used in SSRF 15U laboratory station
Fig. 21. Figure measurement results of elliptical cylindrical mirror fabricated by profile coating
Fig. 22. Optical testing and results of primary and secondary mirrors for EUV telescope
Fig. 23. Optical testing and result of EUV telescope
Fig. 24. Surface roughness results before and after polishing
Fig. 25. Primary and secondary mirror after coating
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