[1] CHANG M, HU C, LAM P, et al.. High precision deformation measurement by digital phase shifting holographic interferometry［J］. Applied Optics, 1985, 24(22): 3780-3783.

     CHANG M, HU C, LAM P, et al.. High precision deformation measurement by digital phase shifting holographic interferometry［J］. Applied Optics, 1985, 24(22): 3780-3783.

[2] CHI G CH, ZHOU ZH F, ZHOU W D. Development of laser interferometric profile measurement technology ［J］. Modern Scientific Instruments, 1996(4): 33-35.(in Chinese)

     CHI G CH, ZHOU ZH F, ZHOU W D. Development of laser interferometric profile measurement technology ［J］. Modern Scientific Instruments, 1996(4): 33-35.(in Chinese)

[3] FANG J G. Research on Three-dimensional Micro-surface Phase-shifting Interferometry ［D］. Hangzhou: Zhejiang University, 2006. (in Chinese)

     FANG J G. Research on Three-dimensional Micro-surface Phase-shifting Interferometry ［D］. Hangzhou: Zhejiang University, 2006. (in Chinese)

[4] THIAN S H, FENG W, WONG Y S, et al.. Dimensional measurement of 3D microstruture based on white light interferometer［J］. Journal of Physics: Conference Series, 2007, 48: 1435-1446.

     THIAN S H, FENG W, WONG Y S, et al.. Dimensional measurement of 3D microstruture based on white light interferometer［J］. Journal of Physics: Conference Series, 2007, 48: 1435-1446.

[5] JIN L. Study on Surface Topography Measurement System Based on GPU［D］. Hangzhou: Zhejiang University, 2011.(in Chinese)

     JIN L. Study on Surface Topography Measurement System Based on GPU［D］. Hangzhou: Zhejiang University, 2011.(in Chinese)

[6] CHEN B SH. Research of Microscopic Surface Three-dimensional Topography Detection System［D］. Harbin: Harbin Institute of Technology, 2013.(in Chinese)

     CHEN B SH. Research of Microscopic Surface Three-dimensional Topography Detection System［D］. Harbin: Harbin Institute of Technology, 2013.(in Chinese)

[7] KIM B, KIM S. Absolute interferometer for three-dimensional profile measurement of rough surfaces［J］. Optics Letters, 2003, 28(7): 528-530.

     KIM B, KIM S. Absolute interferometer for three-dimensional profile measurement of rough surfaces［J］. Optics Letters, 2003, 28(7): 528-530.

[8] MEHTA D S, SAITO S, HINOSUGI H, et al.. Spectral interference Mirau microscope with an acousto-optic tunable filter for three-dimensional surface profilometry［J］. Applied Optics, 2003, 42(7): 1296-1305.

     MEHTA D S, SAITO S, HINOSUGI H, et al.. Spectral interference Mirau microscope with an acousto-optic tunable filter for three-dimensional surface profilometry［J］. Applied Optics, 2003, 42(7): 1296-1305.

[9] CHANG S P. The Surface Shape and Profile Dimension Measurement Method and System Based on White-light Interferometric Technology［D］. Wuhan: Huazhong University of Science and Technology, 2007.(in Chinese)

     CHANG S P. The Surface Shape and Profile Dimension Measurement Method and System Based on White-light Interferometric Technology［D］. Wuhan: Huazhong University of Science and Technology, 2007.(in Chinese)

[10] YUN J P. Research on Contact and Noncontact Hybrid Measurement System of Profile Based on White Light Interferometry［D］. Wuhan: Huazhong University of Science and Technology, 2008.(in Chinese)

     YUN J P. Research on Contact and Noncontact Hybrid Measurement System of Profile Based on White Light Interferometry［D］. Wuhan: Huazhong University of Science and Technology, 2008.(in Chinese)

[11] LI SH H. Optical3D Shape Measurement of Ultra-precision Specular Surface［D］. Tianjin: Tianjin University, 2012.(in Chinese)

     LI SH H. Optical3D Shape Measurement of Ultra-precision Specular Surface［D］. Tianjin: Tianjin University, 2012.(in Chinese)

[12] MA G Q, LIU L, YU ZH L, et al.. Application and development of three-dimensional profile measurement for large and complex surface［J］. Chinese Optics, 2019, 12(2): 214-228.(in Chinese)

     MA G Q, LIU L, YU ZH L, et al.. Application and development of three-dimensional profile measurement for large and complex surface［J］. Chinese Optics, 2019, 12(2): 214-228.(in Chinese)

[13] LIU SH J, ZHANG Y L, ZHANG H CH. Profile measurement of thin transparentsoft film surface［J］. Chinese Optics, 2014, 7(2): 326-331.(in Chinese)

     LIU SH J, ZHANG Y L, ZHANG H CH. Profile measurement of thin transparentsoft film surface［J］. Chinese Optics, 2014, 7(2): 326-331.(in Chinese)

[14] HE B F, WEI C E, LIU B X, et al.. Three-dimensional surface roughness characterization and application［J］. Opt. Precision Eng., 2018, 26(8): 1994-2011.(in Chinese)

     HE B F, WEI C E, LIU B X, et al.. Three-dimensional surface roughness characterization and application［J］. Opt. Precision Eng., 2018, 26(8): 1994-2011.(in Chinese)

[15] SHANG W Q, ZHANG W X, WU ZH, et al.. Three-dimensional measurement system based on full-field heterodyne interferometry［J］. Opt. Precision Eng., 2019, 27(10): 2097-2104.(in Chinese)

     SHANG W Q, ZHANG W X, WU ZH, et al.. Three-dimensional measurement system based on full-field heterodyne interferometry［J］. Opt. Precision Eng., 2019, 27(10): 2097-2104.(in Chinese)

[16] LIN K H, HU Y H. White-light interferometric techniques in microstructure measurement［C］. Proc SPIE 6280, Third International Symposium on Precision Mechanical Measurements, 2006: 62800X.

     LIN K H, HU Y H. White-light interferometric techniques in microstructure measurement［C］. Proc SPIE 6280, Third International Symposium on Precision Mechanical Measurements, 2006: 62800X.

[17] GROSS R, ETTL P, LABOUREUX. White-Light Iinterferometry in High Precision Industrial Applications［J］ .Measure and Quality Control in Production, 2004, 10(12): 123-130

     GROSS R, ETTL P, LABOUREUX. White-Light Iinterferometry in High Precision Industrial Applications［J］ .Measure and Quality Control in Production, 2004, 10(12): 123-130

[18] DAI R. A Research on White-light Interferometric Measurement System of Surface Topography Based on the Scanning Positioning Stage［D］. Wuhan: Huazhong University of Science and Technology, 2007.(in Chinese)

     DAI R. A Research on White-light Interferometric Measurement System of Surface Topography Based on the Scanning Positioning Stage［D］. Wuhan: Huazhong University of Science and Technology, 2007.(in Chinese)

[19] MA L, GUO T, ZHAO J, et al.. MEMS geometric parameters measurement based on white light phase shifting interferometry［J］. Nanotechnology and Precision Engineering, 2011, 9(1): 39-43.(in Chinese)

     MA L, GUO T, ZHAO J, et al.. MEMS geometric parameters measurement based on white light phase shifting interferometry［J］. Nanotechnology and Precision Engineering, 2011, 9(1): 39-43.(in Chinese)

[20] LIU CH, CHEN L, WANG J, et al.. Measurement of surface topography by using white-light scanning interferometry［J］. Opto-Electronic Engineering, 2011, 38(1): 71-75.(in Chinese)

     LIU CH, CHEN L, WANG J, et al.. Measurement of surface topography by using white-light scanning interferometry［J］. Opto-Electronic Engineering, 2011, 38(1): 71-75.(in Chinese)

[21] ZHENG Y. A Research on Software System of Vertical Scanning White Light Interferometry Measurement of Surface Topography［D］. Wuhan: Huazhong University of Science and Technology, 2015.(in Chinese)

     ZHENG Y. A Research on Software System of Vertical Scanning White Light Interferometry Measurement of Surface Topography［D］. Wuhan: Huazhong University of Science and Technology, 2015.(in Chinese)

[22] LUO S J, SUZUKI T, SASAKI O, et al.. Signal correction by detection of scanning position in a white-light interferometer for exact surface profile measurement［J］. Applied Optics, 2019, 58(13): 3548-3554.

     LUO S J, SUZUKI T, SASAKI O, et al.. Signal correction by detection of scanning position in a white-light interferometer for exact surface profile measurement［J］. Applied Optics, 2019, 58(13): 3548-3554.

[23] SUN J, LIU T G, ZHANG Y M, et al.. Five-step measurement method for the position of zero light path difference in a white light interfering system［J］. Journal of Optoelectronics·laser, 2003, 14(12): 1319-1323.(in Chinese)

     SUN J, LIU T G, ZHANG Y M, et al.. Five-step measurement method for the position of zero light path difference in a white light interfering system［J］. Journal of Optoelectronics·laser, 2003, 14(12): 1319-1323.(in Chinese)

[24] DEBNATH S K, KOTHIYAL M P. Experimental study of the phase-shift miscalibration error in phase-shifting interferometry: use of a spectrally resolved white-light interferometer［J］. Applied Optics, 2007, 46(22): 5103-5109.

     DEBNATH S K, KOTHIYAL M P. Experimental study of the phase-shift miscalibration error in phase-shifting interferometry: use of a spectrally resolved white-light interferometer［J］. Applied Optics, 2007, 46(22): 5103-5109.

[25] XIE Y A, HAN ZH G. Study of spatial frequency domain analysis method based on white light interferometry［J］. Opto-Electronic Engineering, 2011, 38(7): 81-85.(in Chinese)

     XIE Y A, HAN ZH G. Study of spatial frequency domain analysis method based on white light interferometry［J］. Opto-Electronic Engineering, 2011, 38(7): 81-85.(in Chinese)

[26] ZHAO ZH L, XIA B C, CHEN L H, et al.. Self-correction of phase step error in phase shifting interferometric measurement［J］. Opt. Precision Eng., 2013, 21(5): 1116-1121.(in Chinese)

     ZHAO ZH L, XIA B C, CHEN L H, et al.. Self-correction of phase step error in phase shifting interferometric measurement［J］. Opt. Precision Eng., 2013, 21(5): 1116-1121.(in Chinese)

[27] SHI Q Q. Research on White Light Interference Microscopy System and Microscopic Phase Shifting Algorithm［D］. Nanjing: Nanjing University of Science and Technology, 2015. (in Chinese)

     SHI Q Q. Research on White Light Interference Microscopy System and Microscopic Phase Shifting Algorithm［D］. Nanjing: Nanjing University of Science and Technology, 2015. (in Chinese)

[28] GIANTO G, SALZENSTEIN F, MONTGOMERY P. Comparison of envelope detection techniques in coherence scanning interferometry［J］. Applied Optics, 2016, 55(24): 6763-6774.

     GIANTO G, SALZENSTEIN F, MONTGOMERY P. Comparison of envelope detection techniques in coherence scanning interferometry［J］. Applied Optics, 2016, 55(24): 6763-6774.

[29] VO Q, FANG F Z, ZHANG X D, et al.. Surface recovery algorithm in white light interferometry based on combined white light phase shifting and fast Fourier transform algorithms［J］. Applied Optics, 2017, 56(29): 8174-8185.

     VO Q, FANG F Z, ZHANG X D, et al.. Surface recovery algorithm in white light interferometry based on combined white light phase shifting and fast Fourier transform algorithms［J］. Applied Optics, 2017, 56(29): 8174-8185.

[30] GAO H C, JIANG Y, ZHANG L C, et al.. Five-step phase-shifting white-light interferometry for the measurement of fiber optic extrinsic Fabry-Perot interferometers［J］. Applied Optics, 2018, 57(5): 1168-1173.

     GAO H C, JIANG Y, ZHANG L C, et al.. Five-step phase-shifting white-light interferometry for the measurement of fiber optic extrinsic Fabry-Perot interferometers［J］. Applied Optics, 2018, 57(5): 1168-1173.