• Chinese Journal of Lasers
  • Vol. 45, Issue 5, 504002 (2018)
Fang Chao1、2, Xiang Yang1、*, and Qi Keqi1、2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • show less
    DOI: 10.3788/CJL201845.0504002 Cite this Article Set citation alerts
    Fang Chao, Xiang Yang, Qi Keqi. Grating Lateral Shearing Interferometry for Suppressing Zero-Order Crosstalk[J]. Chinese Journal of Lasers, 2018, 45(5): 504002 Copy Citation Text show less

    Abstract

    In order to reduce the difficulties in manufacture and assembly of the spatial filter with two square windows in image plane, we propose a grating lateral shearing interferometry based on a nine step phase shifting method, which is used to calibrate the zero-order phase error. The zero-order crosstalk could be eliminated only by a variable space filter. The parameters are designed and the principle verification system is completed for a projection lithography lens with numerical aperture of 0.125. Then the wavefront aberration measurement of this lens is achieved by the restoration of shearing phase and the reconstruction of wavefront. The results show that the wavefront aberration is less than 20.32 nm. The repeatability precision of the grating lateral shearing interferometer is measured. The root-mean-square value of the repeatability precision is 0.1303 nm, which shows the performance of this system is well.
    Fang Chao, Xiang Yang, Qi Keqi. Grating Lateral Shearing Interferometry for Suppressing Zero-Order Crosstalk[J]. Chinese Journal of Lasers, 2018, 45(5): 504002
    Download Citation