• Optics and Precision Engineering
  • Vol. 28, Issue 12, 2629 (2020)
SU Ya-hui1,2,3,*, QIN Tian-tian1, XU Bing4, and WU Dong4
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
  • 4[in Chinese]
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    DOI: 10. 37188/ope. 20202812. 2629 Cite this Article
    SU Ya-hui, QIN Tian-tian, XU Bing, WU Dong. P attern ed m icrolen s p rocessed u sing tw o -photon polym erization of fem tosecond laser and its im agin g test[J]. Optics and Precision Engineering, 2020, 28(12): 2629 Copy Citation Text show less

    Abstract

    Two-photon polymerization technology for use in a femtosecond laser was used in the rapid and high-precision processing of a patterned microlens to improve the previous shortcomings, including a complex processing technology, expensive manufacturing technology, and limited pattern design. First, three-dimensional software was used to design the microlens pattern through the deformation of the spherical wave factor, and the two-photon polymerization processing technology for a femtosecond laser was used to process the patterned microlens in the photoresist sample. The sample was then placed in a developer to re. move the unprocessed area and obtain the corresponding patterned microlens. Finally, an imaging test and a light intensity homogenization analysis of the patterned microlens were carried out. An LED light source was placed below the patterned microlens, and the light was successfully focused through the patterned mi. crolens to obtain the corresponding patterns with the same light intensity. The experiment shows that the two-photon polymerization of a femtosecond laser can realize the flexible and controllable processing of a 3D microlens structure, a processing power of 7 mW, an exposure time of 2 ms, a scanning xy-step of 0. 5 μm, and a z-step of0. 8-1. 5 μm, ensuring the smooth surface of the microlens structure and realizing a rap. id microlens processing. The two-photon polymerization technology for a femtosecond laser will play an important role in the processing field such as optical metamaterials, optical microdevices, and integrated optical devices.
    SU Ya-hui, QIN Tian-tian, XU Bing, WU Dong. P attern ed m icrolen s p rocessed u sing tw o -photon polym erization of fem tosecond laser and its im agin g test[J]. Optics and Precision Engineering, 2020, 28(12): 2629
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