Lixin ZHANG, Botong SUN, Xingyun LIU, Bohua YIN, Junbiao LIU, Li HAN. Design and experiment of micro-arrayed beam blanker[J]. Optics and Precision Engineering, 2024, 32(13): 2061

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- Optics and Precision Engineering
- Vol. 32, Issue 13, 2061 (2024)

Fig. 1. Schematic drawing of multi-beam electron optical system

Fig. 2. Working principle of arrayed beam blanker

Fig. 3. Design of micro-arrayed beam blanker

Fig. 4. Critical dimensions of arrayed beam blanker

Fig. 5. Fabrication flow chart of arrayed beam blanker

Fig. 6. Image of fabricated arrayed beam blanker

Fig. 7. Physical map of assembled beam blanker

Fig. 8. Controller design scheme of beam blanker

Fig. 9. Physical map of arrayed beam blanker controller

Fig. 10. Numbering of arrayed beam blanker

Fig. 11. Multi-beam electron beam test bench

Fig. 12. Experimental results of electron beam deflection by 3×3 arrayed beam blanker

Fig. 13. Comparison of deviation calculation of arrayed beam blanker
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Table 1. Experimental results of rise and fall time of arrayed beam blanker
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Table 2. Calculation result of deflection distance of arrayed beam blanker
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Table 3. Deviation calculation result of deflection distance of arrayed beam blanker

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