Lixin ZHANG, Botong SUN, Xingyun LIU, Bohua YIN, Junbiao LIU, Li HAN. Design and experiment of micro-arrayed beam blanker[J]. Optics and Precision Engineering, 2024, 32(13): 2061
- Optics and Precision Engineering
- Vol. 32, Issue 13, 2061 (2024)
Fig. 1. Schematic drawing of multi-beam electron optical system
Fig. 2. Working principle of arrayed beam blanker
Fig. 3. Design of micro-arrayed beam blanker
Fig. 4. Critical dimensions of arrayed beam blanker
Fig. 5. Fabrication flow chart of arrayed beam blanker
Fig. 6. Image of fabricated arrayed beam blanker
Fig. 7. Physical map of assembled beam blanker
Fig. 8. Controller design scheme of beam blanker
Fig. 9. Physical map of arrayed beam blanker controller
Fig. 10. Numbering of arrayed beam blanker
Fig. 11. Multi-beam electron beam test bench
Fig. 12. Experimental results of electron beam deflection by 3×3 arrayed beam blanker
Fig. 13. Comparison of deviation calculation of arrayed beam blanker
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Table 1. Experimental results of rise and fall time of arrayed beam blanker
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Table 2. Calculation result of deflection distance of arrayed beam blanker
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Table 3. Deviation calculation result of deflection distance of arrayed beam blanker
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