• Optics and Precision Engineering
  • Vol. 32, Issue 13, 2061 (2024)
Lixin ZHANG1, Botong SUN1, Xingyun LIU1,2, Bohua YIN1,2,*..., Junbiao LIU1,2 and Li HAN1,2|Show fewer author(s)
Author Affiliations
  • 1Research Department of Micro-nano Fabrication Technology and Intelligent Electronic Devices, Institute of Electrical Engineering, Chinese Academy of Sciences, Beijing0090, China
  • 2School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing100049, China
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    DOI: 10.37188/OPE.20243213.2061 Cite this Article
    Lixin ZHANG, Botong SUN, Xingyun LIU, Bohua YIN, Junbiao LIU, Li HAN. Design and experiment of micro-arrayed beam blanker[J]. Optics and Precision Engineering, 2024, 32(13): 2061 Copy Citation Text show less
    Schematic drawing of multi-beam electron optical system
    Fig. 1. Schematic drawing of multi-beam electron optical system
    Working principle of arrayed beam blanker
    Fig. 2. Working principle of arrayed beam blanker
    Design of micro-arrayed beam blanker
    Fig. 3. Design of micro-arrayed beam blanker
    Critical dimensions of arrayed beam blanker
    Fig. 4. Critical dimensions of arrayed beam blanker
    Fabrication flow chart of arrayed beam blanker
    Fig. 5. Fabrication flow chart of arrayed beam blanker
    Image of fabricated arrayed beam blanker
    Fig. 6. Image of fabricated arrayed beam blanker
    Physical map of assembled beam blanker
    Fig. 7. Physical map of assembled beam blanker
    Controller design scheme of beam blanker
    Fig. 8. Controller design scheme of beam blanker
    Physical map of arrayed beam blanker controller
    Fig. 9. Physical map of arrayed beam blanker controller
    Numbering of arrayed beam blanker
    Fig. 10. Numbering of arrayed beam blanker
    Multi-beam electron beam test bench
    Fig. 11. Multi-beam electron beam test bench
    Experimental results of electron beam deflection by 3×3 arrayed beam blanker
    Fig. 12. Experimental results of electron beam deflection by 3×3 arrayed beam blanker
    Comparison of deviation calculation of arrayed beam blanker
    Fig. 13. Comparison of deviation calculation of arrayed beam blanker
    束闸编号

    上升时间

    /ns

    下降时间

    /ns

    偏转速度(按上升时间计算)/MHz
    1365427.8
    230.243.633.1
    333.755.829.7
    429.747.633.7
    52347.443.5
    63247.431.3
    726.655.937.6
    831.95531.4
    934.650.728.9
    Table 1. Experimental results of rise and fall time of arrayed beam blanker
    束闸编号1-2间距2-3间距4-5间距5-6间距7-8间距8-9间距
    初始位置132.94133.98133.84130.67131.57130.08
    1号偏转107.03135.57133.83131.63130.76131.24
    2号偏转163.79108.09134.37130.26131.05131.69
    3号偏转131.19161.84134.02131.79130.05132.10
    4号偏转129.63132.79105.70132.43129.51130.96
    5号偏转133.40131.62163.45102.99130.24130.73
    6号偏转132.50135.20133.58160.36129.40132.04
    7号偏转133.14134.14133.76129.52104.75132.48
    8号偏转132.69134.43134.08130.38154.13107.91
    9号偏转132.95135.07133.64130.93130.75160.79
    Table 2. Calculation result of deflection distance of arrayed beam blanker
    束闸编号1-2间距2-3间距4-5间距5-6间距7-8间距8-9间距
    1号偏转-25.911.60-0.020.95-0.821.16
    2号偏转30.85-25.890.53-0.42-0.531.61
    3号偏转-1.7527.870.181.11-1.532.03
    4号偏转-3.31-1.19-28.151.75-2.060.88
    5号偏转0.46-2.3629.60-27.68-1.340.65
    6号偏转-0.451.22-0.2629.69-2.171.97
    7号偏转0.200.17-0.08-1.16-26.822.40
    8号偏转-0.250.450.23-0.2922.55-22.17
    9号偏转0.011.09-0.200.26-0.8230.72
    Table 3. Deviation calculation result of deflection distance of arrayed beam blanker
    Lixin ZHANG, Botong SUN, Xingyun LIU, Bohua YIN, Junbiao LIU, Li HAN. Design and experiment of micro-arrayed beam blanker[J]. Optics and Precision Engineering, 2024, 32(13): 2061
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