In this study， we designed a piezoresistive cantilever beam structure bionic cilia micro flow sensor to address the problem of difficult and low-accuracy micro fluid flow measurement. First， we compared and analyzed the advantages and disadvantages of existing hot-wire， piezoelectric， and piezoresistive micro flow sensors. Then， we designed a cantilever beam structure micro flow sensor based on the piezoresistive principle， given the superior linearity between the strain and the resistance value of the piezoresistive sensor. Second， parameters such as the optimal array size， diameter， height， and cantilever beam length of the bionic cilia were determined using finite-element numerical analysis. Then， the meniscus-confined electrodeposition method was used to prepare bionic cilia arrays and to fabricate the micro flow sensor. Finally， the experimental results were obtained in a self-made device； they demonstrate that the sensor can accurately sense and measure flow velocities that exceed 0.4 m/s with a nonlinear error of 2.84%. The results indicate that the proposed bionic cilia strain gauge flow sensor has a wide range of applications in micro flow measurement.