[1] POL F C M.A pump based on micro-engineering techniques[D].University of Twente,1989.

[2] WOIAS P.Micropumps-summarizing the first two decades[J].SPIE,2001,4560:39-52.

[3] OLSSON A,ENOKSSON P,STEMME G,et al.Micromachined flat-walled valve-less diffuser pumps[J].Journal of Microelectromechanical Systems,1997,6(2):161-166.

[4] ANDERSSON H,WIJNGAATR W,NILSSON P,et al.A valve-less diffuser micropump for microfluidic analytical systems[J].Sensors and Actuators B,2001,72:259-265.

[5] GERLACH T,SCHUENEMANN M,WURMUS H.A new micropump principle of the reciprocating type using pyramidic micro flow channels as passive valves[J].Journal of Micromechanics and Microengineering,1995,5:199-201.

[6] FORSTER F,BARDELL R L,AFROMOWITZ M,et al.Design,fabrication and testing of fixed-valve micro-pumps[J].ASME Fluids Engineering Devision,1995,234:39-44.

[7] BARDELL R L,SHARMA N R,FORSTER F K,et al.Designing high-performance micro-pumps based on no-moving-parts valves[J].Microelectromechanical Systems (MEMS),1997,354:47-53.

[8] JANG L S,MORRIS C J,SHARMA N R,et al.Transport of particle-laden fluids through fixed-valve micropumps[J].Micro-Electro-Mechanical Systems (MEMS),1999,1:503-509.

[9] MORRIS C J,FORSTER F K.The correct treatment of harmonic pressure-flow behavior in microchannels[J].Micro-Electro-Mechanical Systems (MEMS),2000,2:473-479.

[11] OLSSON A.Valve-less diffuser micropumps[D].Sweden:Royal Institute of Technology,1998.