Jilong TANG, Xiongwei XU, Tianxiang CHEN, Na GAO, Jiewei CAO, Lin LI. Preparation of Self-supporting Al Filter[J]. Acta Photonica Sinica, 2022, 51(6): 0631001
- Acta Photonica Sinica
- Vol. 51, Issue 6, 0631001 (2022)
Fig. 1. Self-supporting Al filter prepared by two release agents
Fig. 2. Calibration sample
Fig. 3. Al film thickness calibration result
Fig. 4. SEM images of Al filter
Fig. 5. Pinholes of Al filter
Fig. 6. The transmittance of Al filters prepared by different release agents in ultraviolet，visible and infrared bands
Fig. 7. Comparison of transmittance between 80 nm self-supporting Al filter and 400 nm PI + 80 nm Al filter
Fig. 8. The transmittance of Al filter prepared with two kinds of release agents in soft X-ray band and the comparison with the theoretical value
Fig. 9. Comparison between the measured and theoretical values of the filter in the energy range of 50~250 eV
Fig. 10. XPS test results of Al filters prepared by two release agents
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Table 1. The peak areas of C，O and Al elements in the two samples
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