Three-step lithography to the fabrication of vertically coupled micro-ring resonators in amorphous silicon-on-insulator-corrigendum

Jun Cheng; Duk-Yong Choi

doi:10.3788/col201614.043501

Journals >Chinese Optics Letters >Volume 14 >Issue 4 >Page 043501 > Article

Chinese Optics Letters
Vol. 14, Issue 4, 043501 (2016)

Three-step lithography to the fabrication of vertically coupled micro-ring resonators in amorphous silicon-on-insulator-corrigendum

Jun Cheng¹ and Duk-Yong Choi²

Author Affiliations

¹School of Electromechanical Engineering, Beijing Institute of Technology, Beijing1 00081 , China

²Centre for Ultrahigh bandwidth Devices for Optical Systems, Laser Physics Centre, Research School of Physics and Engineering, The Australian National University, Canberra, ACT2 601, Australia

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DOI: 10.3788/col201614.043501 Cite this Article Set citation alerts

Jun Cheng, Duk-Yong Choi. Three-step lithography to the fabrication of vertically coupled micro-ring resonators in amorphous silicon-on-insulator-corrigendum[J]. Chinese Optics Letters, 2016, 14(4): 043501 Copy Citation Text

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