• Chinese Journal of Lasers
  • Vol. 41, Issue 10, 1003010 (2014)
Wang Yuqian1、*, Zhang Junzhan1, Liu Yongsheng2, Yang Xiaojun3, Li Weinan3, and Wang Chunhui2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    DOI: 10.3788/cjl201441.1003010 Cite this Article Set citation alerts
    Wang Yuqian, Zhang Junzhan, Liu Yongsheng, Yang Xiaojun, Li Weinan, Wang Chunhui. Effect of Femtosecond Laser Parameters on TiC Ceramic Micro-Hole Drilling[J]. Chinese Journal of Lasers, 2014, 41(10): 1003010 Copy Citation Text show less

    Abstract

    Drilling micro-holes in TiC ceramic with femtosecond laser in different laser fluence and assisted gas pressure has been demonstrated. Scanning electron microscope (SEM), micrometer X-ray 3D imaging system (Micro-CT) and X-ray photoelectron spectroscopy (XPS) are used to investigate the morphology and chemical bonds of micro-holes. The results show that the circularities of micro-holes at the entry are not less than 99% when the laser fluence varies. The circularities of micro-holes at the exit increase as the laser fluence grows, then it tend to be stable. The maximum value of the circularity at the exit is 95%. The taper of micro-holes increases with the assisted gas pressure. When the laser fluence is 0.51 J/mm2, the taper of micro-holes drilled with 0.3 MPa gas pressure is the best, its long axis taper is -0.13° and the short axis taper is 0.77°. C-C bonds and Ti-C bonds rupture while debris which contains metal Ti、Ti2O3 and TiO2 forms around the micro-holes during laser drilling. Lastly, the mechanism of interactions between laser beam and materials is discussed.
    Wang Yuqian, Zhang Junzhan, Liu Yongsheng, Yang Xiaojun, Li Weinan, Wang Chunhui. Effect of Femtosecond Laser Parameters on TiC Ceramic Micro-Hole Drilling[J]. Chinese Journal of Lasers, 2014, 41(10): 1003010
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