HE Jia-hui, ZHOU Peng, YU Hui-jun, SHEN Wen-jiang, SI jin-hai. Research on Large Size MEMS Scanning Mirror Driven by Electromagnetic[J]. Acta Photonica Sinica, 2017, 46(1): 123003

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- Acta Photonica Sinica
- Vol. 46, Issue 1, 123003 (2017)
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