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    Journals >Chinese Journal of Lasers >Volume 35 >Issue 2 >Page 240 > Article
    • Chinese Journal of Lasers
    • Vol. 35, Issue 2, 240 (2008)
    Nonlinear Error Analysis of Laser Synthetic-Wavelength Nanomeasurement Interferometer
    Chen Benyong1、*, Mu Ruizhen1, Zhou Yanjiang1, and Li Dacheng2
    Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: Cite this Article Set citation alerts
    Chen Benyong, Mu Ruizhen, Zhou Yanjiang, Li Dacheng. Nonlinear Error Analysis of Laser Synthetic-Wavelength Nanomeasurement Interferometer[J]. Chinese Journal of Lasers, 2008, 35(2): 240 Copy Citation Text show less
    References

    [1] Wenmei Hou, Günter Wilkening. Investiagtion and compensation of the nonlinearity of heterodyne interferometers [J]. Precision Engineering, 1992, 14(2):91～98

    [2] A. E. Rosenbluth, N. Bobroff. Optical sources of nonlinearity in heterodyne interferometers [J]. Precision Engineering, 1990, 12(1):7～11

    [5] Chien-ming Wu, Ching-shen Su, Gwo-sheng Peng. Correction of nonlinearity in one-frequency optical interferometry [J]. Meas. Sci. Technol., 1996, 7(4):520～524

    [9] Chien-ming Wu, Ching-shen Su. Nonlinearity in measurements of length by optical interferometry [J]. Meas. Sci. Technol., 1996, 7(1):62～68

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    Chen Benyong, Mu Ruizhen, Zhou Yanjiang, Li Dacheng. Nonlinear Error Analysis of Laser Synthetic-Wavelength Nanomeasurement Interferometer[J]. Chinese Journal of Lasers, 2008, 35(2): 240
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    Paper Information
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