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    Journals >Optics and Precision Engineering >Volume 14 >Issue 2 >Page 173 > Article
    • Optics and Precision Engineering
    • Vol. 14, Issue 2, 173 (2006)
    Structural error correction and simulation of capacitive displacement sensor for segmented mirrors
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    [in Chinese], [in Chinese]. Structural error correction and simulation of capacitive displacement sensor for segmented mirrors[J]. Optics and Precision Engineering, 2006, 14(2): 173 Copy Citation Text show less

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    [in Chinese], [in Chinese]. Structural error correction and simulation of capacitive displacement sensor for segmented mirrors[J]. Optics and Precision Engineering, 2006, 14(2): 173
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