• Chinese Optics Letters
  • Vol. 8, Issue s1, 163 (2010)
Zhanshan Wang, Jingtao Zhu, Baozhong Mu, Zhong Zhang, Fengli Wang, Xinbin Cheng, Fangfang Wang, and Lingyan Chen
Author Affiliations
  • Institute of Precision Optical Engineering, Physics Department, Tongji University, Shanghai 200092, China
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    DOI: 10.3788/COL201008s1.0163 Cite this Article Set citation alerts
    Zhanshan Wang, Jingtao Zhu, Baozhong Mu, Zhong Zhang, Fengli Wang, Xinbin Cheng, Fangfang Wang, Lingyan Chen. Development of non-periodic multilayer in the EUV, soft X-ray, and X-ray ranges[J]. Chinese Optics Letters, 2010, 8(s1): 163 Copy Citation Text show less
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    CLP Journals

    [1] Jun Chang, Meifang Zou, Ruirui Wang, Shulong Feng, M. M. Talha. All-reflective optical system design for extreme ultraviolet lithography[J]. Chinese Optics Letters, 2010, 8(11): 1082

    Data from CrossRef

    [1] A S Pirozhkov, E N Ragozin. Aperiodic multilayer structures in soft X-ray optics. Physics-Uspekhi, 58, 1095(2015).

    [2] M. M. Barysheva, S. A. Garakhin, A. O. Kolesnikov, A. S. Pirozhkov, V. N. Polkovnikov, E. N. Ragozin, A. N. Shatokhin, R. M. Smertin, M. V. Svechnikov, E. A. Vishnyakov. Broadband normal-incidence mirrors for a range of 111–138 ? based on an a-periodic Mo/Be multilayer structure. Optical Materials Express, 11, 3038(2021).

    [3] Shang-qi Kuang, Xue-peng Gong, Hai-gui Yang. Robust design of broadband EUV multilayer using multi-objective evolutionary algorithm. Optics Communications, 410, 805(2018).

    [4] Aleksandr S. Pirozhkov, Evgenii N. Ragozin. Aperiodic multilayer structures in soft X-ray optics. Uspekhi Fizicheskih Nauk, 185, 1203(2015).

    Zhanshan Wang, Jingtao Zhu, Baozhong Mu, Zhong Zhang, Fengli Wang, Xinbin Cheng, Fangfang Wang, Lingyan Chen. Development of non-periodic multilayer in the EUV, soft X-ray, and X-ray ranges[J]. Chinese Optics Letters, 2010, 8(s1): 163
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