Xiao-teng LIU, Ji-jun FENG, Xin-yao WU, Hai-peng LIU, Fu-ling ZHANG, Zhi-hua FENG, He-ping ZENG. Silicon Waveguide Based Integrated Optical Phased Array Chips （Invited）[J]. Acta Photonica Sinica, 2020, 49(11): 165
- Acta Photonica Sinica
- Vol. 49, Issue 11, 165 (2020)
Fig. 1. Waveguide cross-sectional mode distribution
Fig. 2. The relationship between array waveguide coupling crosstalk and waveguide length
Fig. 3. Light field distribution of beam splitter
Fig. 4. The relationship between beam splitter transmittance and wavelength
Fig. 5. The relationship between the mode equivalent refractive and the effective refractive index of the waveguide core
Fig. 6. The relationship between the FWHM of far-field spot divergence angle and the number of arrayed waveguides
Fig. 7. Array waveguide far-field spot deflection simulation
Fig. 8. Flow chart of silicon-based phased array chip preparation
Fig. 9. Preparation of silicon-based phased array chip and packaging effect
Fig. 10. Schematic diagram of measurement system
Fig. 11. The far-field spot before and after optimization by particle swarm optimization
Fig. 12. The effect of spot deflection with different phase-shifting voltages applied
Fig. 13. The effect of spot deflection under 1550~1610 nm wavelength tuning
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