• Chinese Journal of Lasers
  • Vol. 8, Issue 2, 17 (1981)
Shang Guancheng, Yuan Cailai, Ye Chao, and Dou Airong
Author Affiliations
  • [in Chinese]
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    Shang Guancheng, Yuan Cailai, Ye Chao, Dou Airong. A UV-preionized ArF and KrF excimer laser[J]. Chinese Journal of Lasers, 1981, 8(2): 17 Copy Citation Text show less
    References

    [1] R. Burnham, N. Djeu; Appl. Phys. Lett; 1976, 29, 707.

    [2] Eobert C. Sze, Thomas R. Loree; IEEE J. Quant. Electr., 1978, QE-14, 944.

    [3] T. J. Mokee et al.; IEEE, J. Quant. Electr., 1979, QE-15, 33.

    [5] Τ. Y. Chang; Rev. Scient. Instrum., 1973, 44,405.

    [6] J. N. Hoffman et al., Appl. Phys. Lett., 1976, 28, 538.

    Shang Guancheng, Yuan Cailai, Ye Chao, Dou Airong. A UV-preionized ArF and KrF excimer laser[J]. Chinese Journal of Lasers, 1981, 8(2): 17
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