• Chinese Journal of Lasers
  • Vol. 36, Issue 11, 2869 (2009)
Wang Wei1、2、* and Zhou Changhe1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: 10.3788/cjl20093611.2869 Cite this Article Set citation alerts
    Wang Wei, Zhou Changhe. New Technology for Fabrication of Polymer Microlens Arrays[J]. Chinese Journal of Lasers, 2009, 36(11): 2869 Copy Citation Text show less

    Abstract

    A method for fabrication of microlens arrays using soft lithography is reported. The master of the microlens array is fabricated by traditional thermal reflow technology. The microlens array is first transferred on an elastomeric mold using replica molding method,and then the elastomeric mold with microlens structure on its surface is imprinted on the glass substrate with ultraviolet (UV) curable polymer on it. After the UV glue was fully solidified,the final microlens array is formed on the UV curable polymer of glass substrate. The microlens array is tested and it is found that it has uniform focusing function. This technology has great potential application for fabrication of polymer microlens array with low cost and high throughput.