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    Journals >Chinese Journal of Lasers >Volume 29 >Issue s1 >Page 592 > Article
    • Chinese Journal of Lasers
    • Vol. 29, Issue s1, 592 (2002)
    Study of Beam Transformation in Excimer Laser Micromachining
    JING Tao, YING Bo-hua, CHEN Tao, JIANG Yi-jian, and ZUO Tie-chuan
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    JING Tao, YING Bo-hua, CHEN Tao, JIANG Yi-jian, ZUO Tie-chuan. Study of Beam Transformation in Excimer Laser Micromachining[J]. Chinese Journal of Lasers, 2002, 29(s1): 592 Copy Citation Text show less

    Abstract

    According to the requirement of excimer laser micromachining, an optical system is designed by studying the beam property of the excimer laser.

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    JING Tao, YING Bo-hua, CHEN Tao, JIANG Yi-jian, ZUO Tie-chuan. Study of Beam Transformation in Excimer Laser Micromachining[J]. Chinese Journal of Lasers, 2002, 29(s1): 592
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    Paper Information
    Recommended Topics
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