[1] C. R. Giles, V. Aksyuk, B. Barber, R. Ruel, L. Stulz, and D. Bishop, IEEE J. Selected Topics in Quantum Electron. 5, 18 (1999).
[2] S.-S. Lee, Y.-S. Jin, Y.-S. Son, and T. K. Yoo, IEEE Photon. Technol. Lett. 11, 590 (1999).
[3] C. Marxer, P. Griss, and N. F. de Rooij, IEEE Photon. Technol. Lett. 11, 233 (1999).
[4] H. Debeda, T. V. Freyhold, J. Mohr, V. Wallrabe, and J. Wongelink, IEEE J. of Microelectromechnical System 8, 258 (1999).
[5] S. Sumriddetchkajorn and N. A. Riza, Optical Fiber Communication Conference 3, 240 (2000).
[6] B. M. Andersen, S. Fairchild, and N. Thorsten, MEMS variable optical attenuator for DWDM optical amplifiers, Optical Fiber Communication Conference 2, 260 (2000).
[7] J. E. Ford, J. A. Walker, D. S. Greywall, and K. W. Goossen, J. Lightwave Technology 16, 1663 (1998).
[8] T. M. Liakopoulos and C. H. Ahn, Sensors and Actuators A 77, 66 (1999).
[9] C. Nam, W. Choi, and K. Chun, Proc. SPIE 4230, 10 (2000).