CHU Jin-kui, CHEN Zhao-peng, ZHANG Ran. Microfabrication of SU-8 cantilever micro-force sensor integrated by copper piezoresistance[J]. Optics and Precision Engineering, 2011, 19(12): 2935

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- Optics and Precision Engineering
- Vol. 19, Issue 12, 2935 (2011)
Abstract

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