Antimony selenide (Sb2Se3) has become one of the most popular solar cell materials because of its high abundance and good photoelectric properties. At present, among many preparation methods of Sb2Se3, vapor transfer deposition (VTD) has attracted much attention because of its simple process and large area preparation. There are many factors affecting the preparation of Sb2Se3 films by VTD, such as chamber pressure, reaction temperature, the position of evaporation source and substrate, substrate inclination and so on. Sb2Se3 thin films were prepared by VTD at different substrate inclinations (30°, 45°, 60°, 90°) and characterized by XRD, Raman, SEM and near infrared-ultraviolet (NI-UV) reflection. The results show that different substrate inclinations have obvious effects on the structure and optical properties of the films. The grain size first increases and then decreases with the increase of substrate inclination. At the same time, the morphology of the film changes from rod to sheet. When the substrate inclination is 90°, the film becomes dense. The NI-UV reflection spectrum shows that the sample with an inclination of 60°, has the lowest reflectivity in the range of wavelength less than 1 100 nm. The FTO/CdS/Sb2Se3/C device prepared at this angle has a conversion efficiency of 2.38%.